Invention Grant
US09436081B2 Methods of modifying masking reticles to remove forbidden pitch regions thereof
有权
修改遮蔽掩模版以除去其禁止的间距区域的方法
- Patent Title: Methods of modifying masking reticles to remove forbidden pitch regions thereof
- Patent Title (中): 修改遮蔽掩模版以除去其禁止的间距区域的方法
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Application No.: US14205569Application Date: 2014-03-12
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Publication No.: US09436081B2Publication Date: 2016-09-06
- Inventor: Jason Eugene Stephens , David Pritchard
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Main IPC: G03F1/72
- IPC: G03F1/72

Abstract:
A method is provided, in which a masking reticle including a plurality of pattern blocks is modified, the modifying including: identifying a first pattern block and a second pattern block of the plurality of pattern blocks where at least a first portion of the first pattern block and a second portion of the second pattern block are in parallel relation; and reducing a length of the first portion of the first pattern block when a transverse separation S between corresponding length edges of the first portion of the first pattern block the second portion of the second pattern block falls within a pre-defined forbidden pitch range for the masking reticle. The method may include repeating the identifying and reducing of pairs of pattern blocks on the mask reticle to remove portions of pattern block pairs spaced apart by a transverse separation falling within a forbidden-pitch range.
Public/Granted literature
- US20150261084A1 METHODS OF MODIFYING MASKING RETICLES TO REMOVE FORBIDDEN PITCH REGIONS THEREOF Public/Granted day:2015-09-17
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