Invention Grant
- Patent Title: Interface control in a bipolar junction transistor
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Application No.: US13971982Application Date: 2013-08-21
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Publication No.: US09437717B2Publication Date: 2016-09-06
- Inventor: Kevin K. Chan , Peng Cheng , Qizhi Liu , Ljubo Radic
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L29/73
- IPC: H01L29/73 ; H01L29/66 ; H01L29/737 ; H01L29/10 ; G06F17/50

Abstract:
Methods of fabricating bipolar junction transistors, bipolar junction transistors, and design structures for a bipolar junction transistor. A first portion of the intrinsic base layer is masked while a second portion of an intrinsic base layer is etched. As a consequence of the masking, the second portion of the intrinsic base layer is thinner than the first portion of the intrinsic base layer. An emitter and an extrinsic base layer are formed in respective contacting relationships with the first and second portions of the intrinsic base layer.
Public/Granted literature
- US20130334664A1 INTERFACE CONTROL IN A BIPOLAR JUNCTION TRANSISTOR Public/Granted day:2013-12-19
Information query
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