Invention Grant
- Patent Title: Method of manufacturing space transformer for probe card
- Patent Title (中): 探针卡空间变压器的制造方法
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Application No.: US14224727Application Date: 2014-03-25
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Publication No.: US09442135B2Publication Date: 2016-09-13
- Inventor: Kuan-Chun Chou , Huo-Kang Hsu , Hui-Pin Yang , Chien-Kuei Wang
- Applicant: MPI CORPORATION
- Applicant Address: TW Chu-Pei, Hsinchu Shien
- Assignee: MPI CORPORATION
- Current Assignee: MPI CORPORATION
- Current Assignee Address: TW Chu-Pei, Hsinchu Shien
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW102110741A 20130326
- Main IPC: H05K3/20
- IPC: H05K3/20 ; G01R3/00 ; G01R1/073

Abstract:
A method of manufacturing a space transformer for a probe card includes the steps of mounting and electrically connecting second substrates on a first substrate, forming an insulated layer with through holes on each of the second substrates, and forming electrically conductive blocks in the through holes, respectively. Because the electrically conductive blocks are formed after the second substrates are mounted to the first substrate, any unexpected relative displacement of the first and second substrates during mounting is uninfluential to positions of the electrically conductive blocks. Besides, a step of planarizing the electrically conductive blocks can be further carried out. Therefore, the positions and flatness of probe needles may not need to be adjusted after the probe needles are connected with the electrically conductive blocks of the space transformer thus obtained.
Public/Granted literature
- US20140290053A1 METHOD OF MANUFACTURING SPACE TRANSFORMER FOR PROBE CARD Public/Granted day:2014-10-02
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