Invention Grant
- Patent Title: Vicinal surfaces of polycrystalline structures
- Patent Title (中): 多晶结构的表面
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Application No.: US13774400Application Date: 2013-02-22
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Publication No.: US09446949B2Publication Date: 2016-09-20
- Inventor: Boaz Pokroy , Shirly Borukhin
- Applicant: Technion Research and Development Foundation Ltd.
- Applicant Address: IL Haifa
- Assignee: Technion Research and Development Foundatin Ltd.
- Current Assignee: Technion Research and Development Foundatin Ltd.
- Current Assignee Address: IL Haifa
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C16/01 ; B82B3/00 ; H01L21/02 ; H01L21/00
Abstract:
The present invention provides vicinal surfaces of polycrystalline materials and a method for their preparation. The method includes the deposition of a polycrystalline material on a substrate followed by removing the material from the substrate so as to expose a vicinal surface having stepped terraces. The step of removing the material from the substrate may be preceded by annealing. The vicinal surfaces are useful for a variety of applications.
Public/Granted literature
- US20130216780A1 VICINAL SURFACES OF POLYCRYSTALLINE STRUCTURES Public/Granted day:2013-08-22
Information query
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