Invention Grant
- Patent Title: Sloped electrode element for a torsional spatial light modulator
- Patent Title (中): 用于扭转空间光调制器的倾斜电极元件
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Application No.: US14531877Application Date: 2014-11-03
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Publication No.: US09448484B2Publication Date: 2016-09-20
- Inventor: Patrick I. Oden , James C. Baker , Sandra Zheng , William C. McDonald , Lance W. Barron
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Michael A. Davis, Jr.; Frank D. Cimino
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B26/08 ; G03F7/36 ; G03F7/16
Abstract:
A method of forming a micro-electromechanical systems (MEMS) pixel, such as a DMD-type pixel, by depositing a photoresist spacer layer upon a substrate. The photoresist spacer layer is exposed to a grey-scale lithographic mask to shape an upper surface of the photoresist spacer layer. A control member is formed upon the shaped spacer layer, and has a sloped portion configured to maximize energy density. An image member is configured to be positioned as a function of the control member to form a spatial light modulator (SLM).
Public/Granted literature
- US20160124311A1 SLOPED ELECTRODE ELEMENT FOR A TORSIONAL SPATIAL LIGHT MODULATOR Public/Granted day:2016-05-05
Information query
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