Invention Grant
US09449762B2 Embedded package substrate capacitor with configurable/controllable equivalent series resistance 有权
具有可配置/可控等效串联电阻的嵌入式封装衬底电容器

Embedded package substrate capacitor with configurable/controllable equivalent series resistance
Abstract:
Some novel features pertain to package substrates that include a substrate having an embedded package substrate (EPS) capacitor with equivalent series resistance (ESR) control. The EPS capacitor includes two conductive electrodes separated by a dielectric or insulative thin film material and an equivalent series resistance (ESR) control structure located on top of each electrode connecting the electrodes to vias. The ESR control structure may include a metal layer, a dielectric layer, and a set of metal pillars which are embedded in the set of metal pillars are embedded in the dielectric layer and extend between the electrode and the metal layer. The EPS capacitor having the ESR control structure form an ESR configurable EPS capacitor which can be embedded in package substrates.
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