Invention Grant
- Patent Title: Thin film transistor and display device
- Patent Title (中): 薄膜晶体管和显示装置
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Application No.: US14423838Application Date: 2013-08-30
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Publication No.: US09449990B2Publication Date: 2016-09-20
- Inventor: Aya Miki , Shinya Morita , Hiroshi Goto , Hiroaki Tao , Toshihiro Kugimiya , Byung Du Ahn , Gun Hee Kim , Jin Hyun Park , Yeon Hong Kim
- Applicant: KOBE STEEL, LTD. , Samsung Display Co., Ltd.
- Applicant Address: JP Kobe-shi KR Yongin
- Assignee: KOBE STEEL, LTD.,Samsung Display Co., Ltd.
- Current Assignee: KOBE STEEL, LTD.,Samsung Display Co., Ltd.
- Current Assignee Address: JP Kobe-shi KR Yongin
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-192666 20120831; JP2013-094087 20130426
- International Application: PCT/JP2013/073373 WO 20130830
- International Announcement: WO2014/034874 WO 20140306
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; H01L29/51 ; H01L29/40 ; H01L21/02

Abstract:
Provided is a thin film transistor which is provided with an oxide semiconductor thin film layer and has a threshold voltage that does not change much due to light, a bias stress or the like, thereby exhibiting excellent stress stability. A thin film transistor of the present invention is provided with a gate electrode, an oxide semiconductor layer composed of a single layer which is used as a channel layer, an etch stopper layer to protect a surface of the oxide semiconductor layer, a source-drain electrode, and a gate insulator layer arranged between the gate electrode and the channel layer. The metal elements constituting the oxide semiconductor layer comprise In, Zn and Sn. The hydrogen concentration in the gate insulator layer in direct contact with the oxide semiconductor layer is controlled to 4 atomic % or lower.
Public/Granted literature
- US20150228674A1 THIN FILM TRANSISTOR AND DISPLAY DEVICE Public/Granted day:2015-08-13
Information query
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