Invention Grant
US09450141B2 Method for separating growth substrate, method for light-emitting diode, and light-emitting diode manufactured using methods
有权
分离生长衬底的方法,发光二极管的方法和使用方法制造的发光二极管
- Patent Title: Method for separating growth substrate, method for light-emitting diode, and light-emitting diode manufactured using methods
- Patent Title (中): 分离生长衬底的方法,发光二极管的方法和使用方法制造的发光二极管
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Application No.: US14436068Application Date: 2013-08-01
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Publication No.: US09450141B2Publication Date: 2016-09-20
- Inventor: Jeong Hun Heo , Joo Won Choi , Choong Min Lee , Young Wug Kim , Su Jin Shin , Su Youn Hong
- Applicant: Seoul Viosys Co., Ltd.
- Applicant Address: KR Ansan-Si
- Assignee: SEOUL VIOSYS CO., LTD.
- Current Assignee: SEOUL VIOSYS CO., LTD.
- Current Assignee Address: KR Ansan-Si
- Agency: Perkins Coie LLP
- Priority: KR10-2012-0114128 20121015; KR10-2012-0114129 20121015
- International Application: PCT/KR2013/006960 WO 20130801
- International Announcement: WO2014/061906 WO 20140424
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L33/32 ; H01L27/15 ; H01L21/02 ; H01L33/20 ; H01L33/46 ; H01L33/12

Abstract:
Disclosed are a method for separating a growth substrate, a method for manufacturing a light-emitting diode, and the light-emitting diode. The method for separating a growth substrate, according to one embodiment, comprises: preparing a growth substrate; forming a sacrificial layer and a mask pattern on the growth substrate; etching the sacrificial layer by using electrochemical etching (ECE); covering the mask pattern, and forming a plurality of nitride semiconductor stacking structures which are separated from each other by an element separation area; attaching a support substrate to the plurality of semiconductor stacking structures, wherein the support substrate has a plurality of through-holes connected to the element separation area; and separating the growth substrate from the nitride semiconductor stacking structures.
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