Invention Grant
- Patent Title: Electromagnetic wave high frequency hybrid plasma torch
- Patent Title (中): 电磁波高频混合等离子炬
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Application No.: US14758093Application Date: 2013-12-27
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Publication No.: US09451685B2Publication Date: 2016-09-20
- Inventor: Yong-Cheol Hong , Jung-Sik Yoon , Ji-Hun Kim
- Applicant: KOREA BASIC SCIENCE INSTITUTE
- Applicant Address: KR Daejeon
- Assignee: KOREA BASIC SCIENCE INSTITUTE
- Current Assignee: KOREA BASIC SCIENCE INSTITUTE
- Current Assignee Address: KR Daejeon
- Agency: Norton Rose Fulbright US LLP
- Priority: KR10-2012-0154137 20121227
- International Application: PCT/KR2013/012252 WO 20131227
- International Announcement: WO2014/104780 WO 20140703
- Main IPC: B23K10/00
- IPC: B23K10/00 ; H05H1/28 ; H05H1/34 ; H05H1/30 ; H05H1/46

Abstract:
The purpose of the present invention is to solve the problems of conventional high frequency plasma torches and develop a plasma torch which enables quick quenching of high frequency plasma and which overcomes instability resulting from the quick quenching. To accomplish the abovementioned objective, according to one embodiment of the present invention, disclosed is an electromagnetic wave high frequency hybrid plasma torch. The electromagnetic wave high frequency hybrid plasma torch may comprise: an electromagnetic wave oscillator for oscillating electromagnetic waves; a power supply unit for supplying power to the electromagnetic wave oscillator; an electromagnetic wave transmission line for transmitting the electromagnetic waves generated by the electromagnetic wave oscillator; a first plasma-forming gas supply unit for injecting a plasma-forming gas; an electromagnetic wave discharge pipe for generating plasma by the electromagnetic waves introduced from the electromagnetic wave transmission line and the plasma-forming gas injected by the first plasma-forming gas supply unit; a high frequency discharge pipe for introducing an electromagnetic wave plasma flow from the electromagnetic wave discharge pipe; an induction coil structure which is coaxial with the high frequency discharge pipe and which has an interior with an induction coil inserted therein; a cooling water channel for introducing cooling water around the high frequency discharge pipe and discharging the cooling water; and a second plasma-forming gas supply unit for introducing a plasma-forming gas into the high frequency discharge pipe.
Public/Granted literature
- US20150334815A1 ELECTROMAGNETIC WAVE HIGH FREQUENCY HYBRID PLASMA TORCH Public/Granted day:2015-11-19
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