公开(公告)号：US09451685B2

公开(公告)日：2016-09-20

申请号：US14758093

申请日：2013-12-27

Applicant: KOREA BASIC SCIENCE INSTITUTE

Inventor： Yong-Cheol Hong ,  Jung-Sik Yoon ,  Ji-Hun Kim

IPC: B23K10/00 ,  H05H1/28 ,  H05H1/34 ,  H05H1/30 ,  H05H1/46

CPC classification number: H05H1/28 ,  H05H1/30 ,  H05H1/3405 ,  H05H2001/4622

Abstract: The purpose of the present invention is to solve the problems of conventional high frequency plasma torches and develop a plasma torch which enables quick quenching of high frequency plasma and which overcomes instability resulting from the quick quenching. To accomplish the abovementioned objective, according to one embodiment of the present invention, disclosed is an electromagnetic wave high frequency hybrid plasma torch. The electromagnetic wave high frequency hybrid plasma torch may comprise: an electromagnetic wave oscillator for oscillating electromagnetic waves; a power supply unit for supplying power to the electromagnetic wave oscillator; an electromagnetic wave transmission line for transmitting the electromagnetic waves generated by the electromagnetic wave oscillator; a first plasma-forming gas supply unit for injecting a plasma-forming gas; an electromagnetic wave discharge pipe for generating plasma by the electromagnetic waves introduced from the electromagnetic wave transmission line and the plasma-forming gas injected by the first plasma-forming gas supply unit; a high frequency discharge pipe for introducing an electromagnetic wave plasma flow from the electromagnetic wave discharge pipe; an induction coil structure which is coaxial with the high frequency discharge pipe and which has an interior with an induction coil inserted therein; a cooling water channel for introducing cooling water around the high frequency discharge pipe and discharging the cooling water; and a second plasma-forming gas supply unit for introducing a plasma-forming gas into the high frequency discharge pipe.

Abstract translation: 本发明的目的是解决传统的高频等离子体火炬的问题，开发能够快速淬灭高频等离子体的等离子体焰炬，其克服了由快速淬火引起的不稳定性。 为了实现上述目的，根据本发明的一个实施例，公开了一种电磁波高频混合等离子体焰炬。 电磁波高频混合等离子体焰炬可以包括：用于振荡电磁波的电磁波振荡器; 用于向电磁波振荡器供电的电源单元; 用于传输由电磁波振荡器产生的电磁波的电磁波传输线; 用于喷射等离子体形成气体的第一等离子体形成气体供给单元; 电磁波放电管，用于通过从电磁波传输线引入的电磁波和由第一等离子体形成气体供给单元喷射的等离子体形成气体产生等离子体; 用于引入来自电磁波放电管的电磁波等离子体流的高频放电管; 感应线圈结构，其与高频放电管同轴并且具有插入其中的感应线圈的内部; 冷却水通道，用于在高频排放管周围引入冷却水并排出冷却水; 以及用于将等离子体形成气体引入高频排放管的第二等离子体形成气体供给单元。