Invention Grant
- Patent Title: Single crystal pulling apparatus and low heat conductive member used for single crystal pulling apparatus
- Patent Title (中): 用于单晶拉制装置的单晶拉制装置和低导热构件
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Application No.: US13881074Application Date: 2011-11-21
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Publication No.: US09453291B2Publication Date: 2016-09-27
- Inventor: Osamu Okada , Masaaki Kawakami
- Applicant: Osamu Okada , Masaaki Kawakami
- Applicant Address: JP Osaka-shi, Osaka
- Assignee: TOYO TANSO CO., LTD.
- Current Assignee: TOYO TANSO CO., LTD.
- Current Assignee Address: JP Osaka-shi, Osaka
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2010-260242 20101122; JP2011-141661 20110627
- International Application: PCT/JP2011/076798 WO 20111121
- International Announcement: WO2012/070528 WO 20120531
- Main IPC: C30B15/02
- IPC: C30B15/02 ; C30B15/14 ; C30B15/10 ; C30B29/06 ; C30B15/30

Abstract:
A single crystal pulling apparatus (1) has a quartz crucible (2) for accommodating silicon melt (3), a graphite crucible (4) for retaining the quartz crucible (2), a tray (5) for securing and holding the graphite crucible (4) from below, and a crucible rotating shaft (6) for supporting the tray (5) from below and for elevating and lowering the tray (5) and the crucibles (2), (4) while rotating them. A low heat conductive member (10) is interposed on a joint surface between the tray (5) and the crucible rotating shaft (6). The low heat conductive member (10) is formed in a substantially tubular shape, and is interposed in such a manner that a protruding portion of the crucible rotating shaft (6) is inserted through a center hole of the low heat conductive member (10). Thereby, a gap portion (11) is formed below a bottom portion of the tray (5).
Public/Granted literature
Information query
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