Invention Grant
US09453800B2 Apparatus and method of inspecting a defect of an object 有权
检查物体缺陷的装置和方法

Apparatus and method of inspecting a defect of an object
Abstract:
An apparatus for detecting a defect of an object may include a light emitter configured to emit straight polarized lights having different polarized directions, a spatial filter having openings through which the straight polarized lights selectively pass, an optical member configured to condense the straight polarized lights, which pass through the openings, on the object, and a light detector configured to detect lights reflected from the object. Thus, the defect may be accurately detected in a short time.
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