公开(公告)号：US09594240B2

公开(公告)日：2017-03-14

申请号：US14559337

申请日：2014-12-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Nobuyuki Kimura ,  Mitsuhiro Togashi ,  Masaki Takada ,  Mitsunori Numata

IPC: G02B6/00 ,  G02B21/06 ,  G02B21/00 ,  G02B21/08 ,  G02B27/09 ,  F21V8/00 ,  G02B6/036

CPC classification number: G02B21/06 ,  G02B6/0008 ,  G02B6/03694 ,  G02B21/0016 ,  G02B21/082 ,  G02B27/0994

Abstract: Provided are a lighting apparatus, and an optical inspection apparatus and an optical microscope using the lighting apparatus. The lighting apparatus includes a light source that emits light, an optical device that outputs light that is more uniformly intense over a predetermined ray angle distribution than light input thereto; a multi-reflection device that reflects light multiple times, the multi-reflection device having a light incident surface receiving light and a light emission surface that emits multiply reflected light, and a light diffusion device that diffuses the light emitted from the light emission surface of the multi-reflection device. The light source, the optical device, the multi-reflection device, and light diffusion device share an optical path.

Abstract translation: 提供了一种照明装置，以及使用该照明装置的光学检查装置和光学显微镜。 照明装置包括发光的光源，输出比预定的光线角度分布更均匀地强的光的光学装置; 具有多次反射光的多反射装置，具有光入射面的多反射装置和发射多重反射光的发光面，以及扩散装置，其将从发光面发射的光扩散到 多反射装置。 光源，光学器件，多反射器件和光扩散器件共享光路。

公开(公告)号：US20160248504A1

公开(公告)日：2016-08-25

申请号：US14988676

申请日：2016-01-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Mitsuhiro Togashi

IPC: H04B10/116

CPC classification number: H04B10/116 ,  H04N7/22 ,  H04N9/64 ,  H04N11/04

Abstract: A visible light communication system having a transmission apparatus for modulating a transmission signal to a multiple-value number and a reception apparatus for demodulating a multiple-value modulated transmission signal is provided. The transmission apparatus includes a plurality of light emitters for emitting light in different colors, a chromaticity coordinates calculator for mapping a digital value to a chromaticity coordinates value, and a light intensity controller for controlling a light intensity of each of the light emitters based on the chromaticity coordinates value corresponding to the digital value. The reception apparatus includes a plurality of light receivers having different spectral characteristics, a chromaticity coordinates calculator for calculating a chromaticity coordinates value according to a received light intensity detected by each of the light receivers, and a demodulator for demodulating the digital value from the chromaticity coordinates value.

Abstract translation: 提供一种具有用于将发送信号调制为多值数量的发送装置和用于解调多值调制发送信号的接收装置的可见光通信系统。 发送装置包括多个用于发射不同颜色的光的发光体，用于将数字值映射到色度坐标值的色度坐标计算器，以及用于基于所述光发射器控制每个发光体的光强度的光强度控制器 色度坐标值对应于数字值。 接收装置包括具有不同光谱特性的多个光接收器，用于根据由每个光接收器检测的接收光强度来计算色度坐标值的色度坐标计算器和用于从色度坐标解调数字值的解调器 值。

公开(公告)号：US09256061B2

公开(公告)日：2016-02-09

申请号：US14099549

申请日：2013-12-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Mitsuhiro Togashi ,  Harutaka Sekiya

IPC: G02B21/26 ,  G02B21/24 ,  G02B21/00

CPC classification number: G02B21/26 ,  G02B21/0016 ,  G02B21/247

Abstract: A focus control apparatus and method capable of generating a focus position signal according to focus position error even in proximity to an interface between regions having different thicknesses, to perform a high precision focus position control using the focus position signal, are provided. A focus control apparatus includes an error signal correction portion configured to process a focus error signal that indicates an error of a focus position of an optical system with respect to an object. Moreover, the focus control apparatus includes a region conversion detection portion configured to output a region signal that corresponds to a first region or a second region of the object. The first and second regions of the object have different respective heights.

Abstract translation: 提供一种聚焦控制装置和方法，其能够根据聚焦位置误差产生聚焦位置信号，即使在具有不同厚度的区域之间的界面附近，也可以使用聚焦位置信号进行高精度的聚焦位置控制。 聚焦控制装置包括：误差信号校正部，被配置为处理指示相对于物体的光学系统的聚焦位置的误差的聚焦误差信号。 此外，聚焦控制装置包括：区域转换检测部，被配置为输出与物体的第一区域或第二区域对应的区域信号。 物体的第一和第二区域具有不同的高度。

公开(公告)号：US09159528B2

公开(公告)日：2015-10-13

申请号：US14294639

申请日：2014-06-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Takashi Ogawa ,  Yasutsugu Usami ,  Mitsuhiro Togashi

IPC: H01J37/26 ,  H01J37/12 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/12 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24485 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01J2237/281

Abstract: An electron beam apparatus includes at least one electron beam column. The at least one beam column includes an electron beam optical system to irradiate an electron beam on a surface of a sample, and a detection system to detect electrons generated from the electron beam. The electron beam optical system includes an object lens to focus the electron beam on a surface of the sample. The object lens includes an electrostatic lens having a first electrode to which a first voltage is applied, a second electrode that is grounded, a third electrode to which a second voltage is applied, and a fourth electrode that is grounded. The first through fourth electrodes sequentially arranged relative to the sample.

Abstract translation: 电子束装置包括至少一个电子束柱。 所述至少一个光束柱包括用于照射样品表面上的电子束的电子束光学系统和用于检测从电子束产生的电子的检测系统。 电子束光学系统包括将电子束聚焦在样品的表面上的物镜。 物镜包括具有第一电极施加第一电压的静电透镜，接地的第二电极，施加第二电压的第三电极和接地的第四电极。 第一至第四电极相对于样品顺序排列。

公开(公告)号：US20140185044A1

公开(公告)日：2014-07-03

申请号：US14142093

申请日：2013-12-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Akio Ishikawa ,  Mitsuhiro Togashi ,  Mitsunori Numata

IPC: G01N21/88

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/956 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/8825 ,  G01N2021/8848

Abstract: An apparatus for detecting a defect of an object may include a light emitter configured to emit straight polarized lights having different polarized directions, a spatial filter having openings through which the straight polarized lights selectively pass, an optical member configured to condense the straight polarized lights, which pass through the openings, on the object, and a light detector configured to detect lights reflected from the object. Thus, the defect may be accurately detected in a short time.

Abstract translation: 用于检测物体的缺陷的装置可以包括配置为发射具有不同偏振方向的直线偏振光的光发射器，具有直线偏振光选择性地通过的开口的空间滤光器，被配置为冷凝直线偏振光的光学构件， 其穿过物体上的开口，以及被配置为检测从物体反射的光的光检测器。 因此，可以在短时间内精确地检测缺陷。

公开(公告)号：US20140160558A1

公开(公告)日：2014-06-12

申请号：US14099549

申请日：2013-12-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Mitsuhiro Togashi ,  Harutaka Sekiya

IPC: G02B21/26

CPC classification number: G02B21/26 ,  G02B21/0016 ,  G02B21/247

Abstract: A focus control apparatus and method capable of generating a focus position signal according to a real focus position error even in proximity to the interference between regions having different thicknesses to perform a high precision focus position control using the focus position signal are provided. A focus control apparatus includes an error signal correction portion configured to correct a focus error signal which indicates an error from a focus position of an object with respect to an optical system and a region conversion detection portion configured to output a regional signal which corresponds to an observation region or a non-observation region, when the observing region of the optical system is converted between the observation region and the non-observation region having a height different from a height of the observation region, wherein the error signal correction portion corrects the focus error signal to a value corresponding to an error from the focus position in the observation region when the region signal indicates the non-observation region.

Abstract translation: 提供一种聚焦控制装置和方法，其能够根据即使邻近具有不同厚度的区域之间的干涉的实际聚焦位置误差产生聚焦位置信号，以使用聚焦位置信号进行高精度聚焦位置控制。 聚焦控制装置包括：误差信号校正部，被配置为从相对于光学系统的对象的聚焦位置校正指示误差的聚焦误差信号;以及区域转换检测部，被配置为输出对应于 观察区域或非观察区域，其中在观察区域和具有与观察区域的高度不同的高度的观察区域之间转换光学系统的观察区域，其中误差信号校正部分校正焦点 当区域信号表示非观察区域时，误差信号为对应于观察区域中的聚焦位置的误差的值。

公开(公告)号：US09453800B2

公开(公告)日：2016-09-27

申请号：US14142093

申请日：2013-12-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Akio Ishikawa ,  Mitsuhiro Togashi ,  Mitsunori Numata

IPC: G01N21/21 ,  G01N21/95 ,  G01N21/88 ,  G01N21/956

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/956 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/8825 ,  G01N2021/8848

Abstract: An apparatus for detecting a defect of an object may include a light emitter configured to emit straight polarized lights having different polarized directions, a spatial filter having openings through which the straight polarized lights selectively pass, an optical member configured to condense the straight polarized lights, which pass through the openings, on the object, and a light detector configured to detect lights reflected from the object. Thus, the defect may be accurately detected in a short time.

Abstract translation: 用于检测物体的缺陷的装置可以包括配置为发射具有不同偏振方向的直线偏振光的光发射器，具有直线偏振光选择性地通过的开口的空间滤光器，被配置为冷凝直线偏振光的光学构件， 其穿过物体上的开口，以及被配置为检测从物体反射的光的光检测器。 因此，可以在短时间内精确地检测缺陷。

公开(公告)号：US09906298B2

公开(公告)日：2018-02-27

申请号：US14988676

申请日：2016-01-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Mitsuhiro Togashi

IPC: H04B10/116 ,  H04N7/22 ,  H04N9/64 ,  H04N11/04

CPC classification number: H04B10/116 ,  H04N7/22 ,  H04N9/64 ,  H04N11/04

Abstract: A visible light communication system having a transmission apparatus for modulating a transmission signal to a multiple-value number and a reception apparatus for demodulating a multiple-value modulated transmission signal is provided. The transmission apparatus includes a plurality of light emitters for emitting light in different colors, a chromaticity coordinates calculator for mapping a digital value to a chromaticity coordinates value, and a light intensity controller for controlling a light intensity of each of the light emitters based on the chromaticity coordinates value corresponding to the digital value. The reception apparatus includes a plurality of light receivers having different spectral characteristics, a chromaticity coordinates calculator for calculating a chromaticity coordinates value according to a received light intensity detected by each of the light receivers, and a demodulator for demodulating the digital value from the chromaticity coordinates value.