Invention Grant
US09455115B2 Method of adjusting a stigmator in a particle beam apparatus and a Particle beam system 有权
调整粒子束装置和粒子束系统中的扫描器的方法

Method of adjusting a stigmator in a particle beam apparatus and a Particle beam system
Abstract:
A method of adjusting a stigmator in a particle beam apparatus comprises directing a particle beam onto a sample wherein the particle beam traverses a quadrupole field 37 generated by energizing at least four field generators of the stigmator; acquiring first and second images of the sample at different field strengths of the quadrupole field while energizing the at least four field generators according to a first setting of a plurality of settings; acquiring third and fourth images of the sample at different field strengths of the quadrupole field 37 while energizing the at least four field generators according to a second setting of the plurality of settings; determining a plurality of image displacements based on the first, second, third and fourth images; determining an optimum setting of the at least four field generators based on the plurality of image displacements and the plurality of settings.
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