Invention Grant
US09455170B2 Deposition apparatus, organic light emitting display apparatus, and method of manufacturing organic light emitting display apparatus using the deposition apparatus 有权
沉积装置,有机发光显示装置以及使用该沉积装置制造有机发光显示装置的方法

Deposition apparatus, organic light emitting display apparatus, and method of manufacturing organic light emitting display apparatus using the deposition apparatus
Abstract:
A deposition apparatus includes a deposition unit including a plurality of deposition assemblies, which are separated from a substrate at a predetermined distance and deposit a material onto the substrate while a first transfer unit transfers the substrate. Each of the plurality of deposition assemblies includes a patterning slit sheet facing a deposition source nozzle unit, a positional information obtaining unit obtaining positional information regarding a position of the substrate transferred by the first transfer unit, and a sheet stage adjusting a position of the patterning slit sheet with respect to the substrate transferred by the first transfer unit according to the positional information.
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