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Patent Agency Ranking
1.发明申请公开(公告)号：US20150275347A1
公开(公告)日：2015-10-01
申请号：US14740201
申请日：2015-06-15
Applicant: Samsung Display Co., Ltd.
Inventor： Sang-Yong Jeong , Myung-Ki Lee , Sang-Youn Kim , You-Sung Jeon
IPC: C23C14/04
CPC classification number: C23C14/042 , C23C14/54 , G01B11/14 , H01L21/67288 , H01L51/0011 , H01L51/56
Abstract: A thin film deposition apparatus includes: a chamber; a mask stage in the chamber and configured to support a mask; a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage; and a rail in the chamber and configured to support the movement of the jig. Another thin film deposition apparatus includes a chamber, a mask stage positioned within the chamber and configured to support a mask, a camera part proximate to a side of the mask stage, and a jig above the mask stage and configured to move in a direction of the mask stage and over the camera part. The jig is further configured to radiate laser beams in a downward direction from the jig to obtain first scanning data regarding the mask stage and second scanning data regarding the camera part.
Abstract translation: 薄膜沉积设备包括：室; 在所述室中的掩模台，并且构造成支撑掩模; 在所述腔室中和所述掩模台上方的夹具，所述夹具被构造成沿所述掩模台的方向移动; 以及所述腔室中的导轨，并且构造成支撑所述夹具的移动。 另一薄膜沉积装置包括一个腔室，一个位于该腔室内并配置成支撑一个掩模，一个靠近该掩模台一侧的照相机部件和一个位于掩模台上方的夹具的掩模台， 面具舞台和相机部分。 夹具进一步构造成从夹具向下辐射激光束，以获得关于掩模台的第一扫描数据和关于相机部件的第二扫描数据。
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2.发明授权公开(公告)号：US09455170B2
公开(公告)日：2016-09-27
申请号：US14230523
申请日：2014-03-31
Applicant: Samsung Display Co., Ltd.
Inventor： Sang-Youn Kim , Myung-Ki Lee , Sang-Yong Jeong
IPC: H01L51/00 , H01L21/677
CPC classification number: H01L21/6776 , H01L51/0011
Abstract: A deposition apparatus includes a deposition unit including a plurality of deposition assemblies, which are separated from a substrate at a predetermined distance and deposit a material onto the substrate while a first transfer unit transfers the substrate. Each of the plurality of deposition assemblies includes a patterning slit sheet facing a deposition source nozzle unit, a positional information obtaining unit obtaining positional information regarding a position of the substrate transferred by the first transfer unit, and a sheet stage adjusting a position of the patterning slit sheet with respect to the substrate transferred by the first transfer unit according to the positional information.
Abstract translation: 沉积设备包括沉积单元，该沉积单元包括多个沉积组件，其以预定距离与基底分离，并且在第一转移单元转移衬底的同时将材料沉积到衬底上。 多个沉积组件中的每一个包括面向沉积源喷嘴单元的图案化缝隙片，位置信息获取单元获得关于由第一转印单元转印的基底的位置的位置信息，以及片段调整图案形成位置 根据位置信息相对于由第一传送单元传送的基板的狭缝片。
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公开(公告)号：US09435020B2
公开(公告)日：2016-09-06
申请号：US14740201
申请日：2015-06-15
Applicant: Samsung Display Co., Ltd.
Inventor： Sang-Yong Jeong , Myung-Ki Lee , Sang-Youn Kim , You-Sung Jeon
CPC classification number: C23C14/042 , C23C14/54 , G01B11/14 , H01L21/67288 , H01L51/0011 , H01L51/56
Abstract: A thin film deposition apparatus includes: a chamber; a mask stage in the chamber and configured to support a mask; a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage; and a rail in the chamber and configured to support the movement of the jig. Another thin film deposition apparatus includes a chamber, a mask stage positioned within the chamber and configured to support a mask, a camera part proximate to a side of the mask stage, and a jig above the mask stage and configured to move in a direction of the mask stage and over the camera part. The jig is further configured to radiate laser beams in a downward direction from the jig to obtain first scanning data regarding the mask stage and second scanning data regarding the camera part.
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4.发明授权公开(公告)号：US09115427B2
公开(公告)日：2015-08-25
申请号：US14042413
申请日：2013-09-30
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Sang-Yong Jeong , Myung-Ki Lee , Sang-Youn Kim , You-Sung Jeon
CPC classification number: C23C14/042 , C23C14/54 , G01B11/14 , H01L21/67288 , H01L51/0011 , H01L51/56
Abstract: A thin film deposition apparatus includes: a chamber; a mask stage in the chamber and configured to support a mask; a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage; and a rail in the chamber and configured to support the movement of the jig. Another thin film deposition apparatus includes a chamber, a mask stage positioned within the chamber and configured to support a mask, a camera part proximate to a side of the mask stage, and a jig above the mask stage and configured to move in a direction of the mask stage and over the camera part. The jig is further configured to radiate laser beams in a downward direction from the jig to obtain first scanning data regarding the mask stage and second scanning data regarding the camera part.
Abstract translation: 薄膜沉积设备包括：室; 在所述室中的掩模台，并且构造成支撑掩模; 在所述腔室中和所述掩模台上方的夹具，所述夹具被构造成沿所述掩模台的方向移动; 以及所述腔室中的导轨，并且构造成支撑所述夹具的移动。 另一薄膜沉积装置包括一个腔室，一个位于该腔室内并配置成支撑一个掩模，一个靠近该掩模台一侧的照相机部件和一个位于掩模台上方的夹具的掩模台， 面具舞台和相机部分。 该夹具进一步构造成从夹具沿向下的方向辐射激光束，以获得关于掩模台的第一扫描数据和关于相机部件的第二扫描数据。
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5.发明申请公开(公告)号：US20140308763A1
公开(公告)日：2014-10-16
申请号：US14042413
申请日：2013-09-30
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Sang-Yong Jeong , Myung-Ki Lee , Sang-Youn Kim , You-Sung Jeon
CPC classification number: C23C14/042 , C23C14/54 , G01B11/14 , H01L21/67288 , H01L51/0011 , H01L51/56
Abstract: A thin film deposition apparatus includes: a chamber; a mask stage in the chamber and configured to support a mask; a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage; and a rail in the chamber and configured to support the movement of the jig. Another thin film deposition apparatus includes a chamber, a mask stage positioned within the chamber and configured to support a mask, a camera part proximate to a side of the mask stage, and a jig above the mask stage and configured to move in a direction of the mask stage and over the camera part. The jig is further configured to radiate laser beams in a downward direction from the jig to obtain first scanning data regarding the mask stage and second scanning data regarding the camera part.
Abstract translation: 薄膜沉积设备包括：室; 在所述室中的掩模台，并且构造成支撑掩模; 在所述腔室中和所述掩模台上方的夹具，所述夹具被构造成沿所述掩模台的方向移动; 以及所述腔室中的导轨，并且构造成支撑所述夹具的移动。 另一薄膜沉积装置包括一个腔室，一个位于该腔室内并配置成支撑一个掩模，一个靠近该掩模台一侧的照相机部件和一个位于掩模台上方的夹具的掩模台， 面具舞台和相机部分。 夹具进一步构造成从夹具向下辐射激光束，以获得关于掩模台的第一扫描数据和关于相机部件的第二扫描数据。
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