Invention Grant
- Patent Title: Method and apparatus for optical modulation
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Application No.: US13743935Application Date: 2013-01-17
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Publication No.: US09455372B2Publication Date: 2016-09-27
- Inventor: Yurii A. Vlasov , Fengnian Xia
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent David Cain
- Main IPC: G02F1/025
- IPC: G02F1/025 ; G02F1/00 ; G02F1/01 ; G02F1/017 ; H01L33/00

Abstract:
The present invention is a method and an apparatus for optical modulation, for example for use in optical communications links. In one embodiment, an apparatus for optical modulation includes a first silicon layer having one or more trenches formed therein, a dielectric layer lining the first silicon layer, and a second silicon layer disposed on the dielectric layer and filling the trenches.
Public/Granted literature
- US20130143335A1 METHOD AND APPARATUS FOR OPTICAL MODULATION Public/Granted day:2013-06-06
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