公开(公告)号：US09455372B2

公开(公告)日：2016-09-27

申请号：US13743935

申请日：2013-01-17

Applicant: GLOBALFOUNDRIES INC.

Inventor： Yurii A. Vlasov ,  Fengnian Xia

IPC: G02F1/025 ,  G02F1/00 ,  G02F1/01 ,  G02F1/017 ,  H01L33/00

CPC classification number: H01L33/0054 ,  G02F1/0018 ,  G02F1/0081 ,  G02F1/0102 ,  G02F1/011 ,  G02F1/01708 ,  G02F1/025 ,  G02F2202/103 ,  G02F2202/104 ,  G02F2202/105

Abstract: The present invention is a method and an apparatus for optical modulation, for example for use in optical communications links. In one embodiment, an apparatus for optical modulation includes a first silicon layer having one or more trenches formed therein, a dielectric layer lining the first silicon layer, and a second silicon layer disposed on the dielectric layer and filling the trenches.