Invention Grant
- Patent Title: Uniformly distributed self-assembled cone-shaped pillars for high efficiency solar cells
- Patent Title (中): 用于高效太阳能电池的均匀分布的自组装锥形柱
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Application No.: US14153728Application Date: 2014-01-13
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Publication No.: US09459797B2Publication Date: 2016-10-04
- Inventor: Christos Dimitrakopoulos , Augustin J. Hong , Jeehwan Kim , Devendra K. Sadana , Kuen-Ting Shiu
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, INC
- Current Assignee: GLOBALFOUNDRIES, INC
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Yuanmin Cai
- Main IPC: H01L31/02
- IPC: H01L31/02 ; G06F3/06 ; H04W8/06 ; H01L31/0236 ; G06F11/07 ; G06F12/02 ; H04L29/08 ; G06F11/10 ; H04W8/04

Abstract:
A method for fabricating a photovoltaic device includes applying a diblock copolymer layer on a substrate and removing a first polymer material from the diblock copolymer layer to form a plurality of distributed pores. A pattern forming layer is deposited on a remaining surface of the diblock copolymer layer and in the pores in contact with the substrate. The diblock copolymer layer is lifted off and portions of the pattern forming layer are left in contact with the substrate. The substrate is etched using the pattern forming layer to protect portions of the substrate to form pillars in the substrate such that the pillars provide a radiation absorbing structure in the photovoltaic device.
Public/Granted literature
- US20140124033A1 UNIFORMLY DISTRIBUTED SELF-ASSEMBLED CONE-SHAPED PILLARS FOR HIGH EFFICIENCY SOLAR CELLS Public/Granted day:2014-05-08
Information query
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