Invention Grant
- Patent Title: Photomultiplier and its manufacturing method
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Application No.: US14841886Application Date: 2015-09-01
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Publication No.: US09460899B2Publication Date: 2016-10-04
- Inventor: Hiroyuki Kyushima , Hideki Shimoi , Akihiro Kageyama , Keisuke Inoue , Masuo Ito
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2004-040405 20040217
- Main IPC: H01J43/04
- IPC: H01J43/04 ; H01J43/08 ; H01J43/24 ; H01J9/26

Abstract:
The present invention relates to a photomultiplier having a structure for making it possible to easily realize high detection accuracy and fine processing, and a method of manufacturing the same. The photomultiplier comprises an enclosure having an inside kept in a vacuum state, whereas a photocathode emitting electrons in response to incident light, an electron multiplier section multiplying in a cascading manner the electron emitted from the photocathode, and an anode for taking out a secondary electron generated in the electron multiplier section are arranged in the enclosure. A part of the enclosure is constructed by a glass substrate having a flat part, whereas each of the electron multiplier section and anode is two-dimensionally arranged on the flat part in the glass substrate.
Public/Granted literature
- US20150371835A1 PHOTOMULTIPLIER AND ITS MANUFACTURING METHOD Public/Granted day:2015-12-24
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