Invention Grant
- Patent Title: Heat treatment furnace and heat treatment apparatus
- Patent Title (中): 热处理炉和热处理设备
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Application No.: US13527150Application Date: 2012-06-19
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Publication No.: US09466515B2Publication Date: 2016-10-11
- Inventor: Makoto Kobayashi , Kenichi Yamaga , Akira Sasaki , Daisuke Ikeda , Takahiro Koike
- Applicant: Makoto Kobayashi , Kenichi Yamaga , Akira Sasaki , Daisuke Ikeda , Takahiro Koike
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: NICHIAS CORPORATION,TOKYO ELECTRON LIMITED
- Current Assignee: NICHIAS CORPORATION,TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer; Christopher Thomas
- Priority: JP2011-137428 20110621
- Main IPC: B01J3/04
- IPC: B01J3/04 ; H05B3/68 ; F27B17/00 ; C23C16/46 ; F27D1/00 ; H01L21/67
Abstract:
A heat treatment furnace includes: a processing vessel configured to accommodate therein at least one object to be processed; a cylindrical heat insulating member covering a periphery of the processing vessel; and a heater disposed along an inner circumferential surface of the heat insulating member. The heater includes strip-shaped corrugated heater elements disposed along the inner circumferential surface of the heat insulating member, each of the heater elements having valley portions protruding outward and mountain portions protruding inward.
Public/Granted literature
- US20120329002A1 HEAT TREATMENT FURNACE AND HEAT TREATMENT APPARATUS Public/Granted day:2012-12-27
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