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公开(公告)号：US09466515B2
公开(公告)日：2016-10-11
申请号：US13527150
申请日：2012-06-19
CPC分类号： H01L21/67109
摘要： A heat treatment furnace includes: a processing vessel configured to accommodate therein at least one object to be processed; a cylindrical heat insulating member covering a periphery of the processing vessel; and a heater disposed along an inner circumferential surface of the heat insulating member. The heater includes strip-shaped corrugated heater elements disposed along the inner circumferential surface of the heat insulating member, each of the heater elements having valley portions protruding outward and mountain portions protruding inward.
摘要翻译： 热处理炉包括：处理容器，其配置成在其中容纳至少一个待处理物体; 覆盖所述处理容器的周边的圆柱形绝热构件; 以及沿着绝热构件的内周面设置的加热器。 加热器包括沿着隔热构件的内周面设置的带状瓦楞加热器元件，每个加热器元件具有向外突出的谷部分和向内突出的山部分。
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公开(公告)号：US07974525B2
公开(公告)日：2011-07-05
申请号：US12071909
申请日：2008-02-27
CPC分类号： F26B23/06 , F27B17/0025 , H01L21/67109
摘要： The present invention is a heat processing furnace comprising: a processing vessel for accommodating an object to be processed and performing thereto a heat process; and a cylindrical heater disposed to surround a circumference of the processing vessel, for heating the object to be processed; wherein: the heater includes a cylindrical heat insulating member, ribbed shelf sections that are axially formed in a tier-like manner on an inner circumference of the heat insulating member, and heating resistance wires of a helical pattern that are placed along the respective shelf sections; and pin members are arranged in the heat insulating member at suitable intervals therebetween, the pin members holding the heating resistance wires such that the heating resistance wires are movable in a radial direction of the heater, while preventing dropout of the heating resistance wires from the shelf sections.
摘要翻译： 本发明是一种热处理炉，包括：处理容器，用于容纳待加工物体并进行加热处理; 以及设置成围绕处理容器的圆周的圆柱形加热器，用于加热被处理物体; 其特征在于，所述加热器包括圆筒形绝热构件，在所述隔热构件的内周上以层状的方式轴向形成的肋状搁板部，以及沿着各个搁板部放置的螺旋图案的耐热电线 ; 并且销构件以适当的间隔布置在绝热构件中，销构件保持加热电阻线，使得加热电阻线可在加热器的径向方向上移动，同时防止加热电阻丝从搁板 部分。
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公开(公告)号：US08476560B2
公开(公告)日：2013-07-02
申请号：US12320433
申请日：2009-01-26
申请人： Makoto Kobayashi , Kenichi Yamaga , Ken Nakao
发明人： Makoto Kobayashi , Kenichi Yamaga , Ken Nakao
CPC分类号： H01L21/67109 , F27B17/0025 , F27D11/02 , F27D99/0006 , H05B3/08
摘要： A thermal processing furnace comprises: a tubular heat insulation member 4 surrounding a processing vessel 3 for receiving and thermally processing an object to be processed w; a heating resistor 5 helically arranged on an inner circumferential surface of the heat insulation member 4; and a support member 13 disposed on the inner circumferential surface of the heat insulation member 4, the support member 13 supporting the heating resistor 5 such that the heating resistor 5 can be thermally expanded and thermally shrunk. The thermal processing furnace further comprises: a movement prevention member 15 disposed on the heating resistor 5 to be in contact with one side surface of the support member 13 so as to prevent a downward movement of the heating resistor 5.
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4.发明申请公开(公告)号：US20100224614A1
公开(公告)日：2010-09-09
申请号：US12223162
申请日：2007-02-07
申请人： Makoto Kobayashi , Kenichi Yamaga , Takanori Saito
发明人： Makoto Kobayashi , Kenichi Yamaga , Takanori Saito
CPC分类号： H01L21/67109 , H01L21/425 , Y10T29/49083
摘要： The present invention provides a heat treatment apparatus having a high degree of freedom of an outlet design and capable of adjusting the rate of a reduction in the temperature of each part of a heater without using an adjustment valve. The heat treatment apparatus having a simple flow path structure can be constructed with simplified sealing and a reduced cost.The heat treatment apparatus 1 includes a process chamber 2, a tubular heater 3, a heat exhaust system 25 and a cooling section 26. The process chamber 2 accommodates objects W to be placed in multiple stages and to be treated. A predetermined heat treatment is performed in the process chamber. The heater 3 surrounds an outer circumference of the process chamber 2 and heats the objects W to be treated. The heat exhaust system 25 is adapted to exhaust an atmosphere present in a space 24 existing between the heater 3 and the process chamber 2. The cooling section 26 is adapted to blow a cooling fluid into the space 24 to cool the atmosphere. The heater 3 includes a tubular heat insulator 17, a heat generating resistor 18 and an outer shell 20. The heat generating resistor 18 is provided on an inner circumference of the heat insulator 17. The outer shell 20 is provided on an outer circumference of the heat insulator 17. The cooling section 26 includes at least one annular flow path 28 and an outlet 29. The annular flow path 28 is arranged between the heat insulator 17 and the outer shell 20. The outlet 29 is provided in the heat insulator 17. The outlet 29 is arranged to ensure that the cooling fluid is blown out of the outlet 29 toward a vertical central axis of the heat insulator 17 or in a direction oblique to the direction toward vertical central axis of the heat insulator 17.
摘要翻译： 本发明提供一种热处理装置，其具有出口设计的高自由度，并且能够调节加热器的每个部件的温度降低的速率而不使用调节阀。 具有简单的流路结构的热处理装置可以以简单的密封和降低的成本构成。 热处理设备1包括处理室2，管状加热器3，散热系统25和冷却部分26.处理室2容纳待放置的多个物体W并进行处理。 在处理室中进行预定的热处理。 加热器3围绕处理室2的外周并加热被处理物体W. 散热系统25适于排出存在于加热器3和处理室2之间的空间24中的气氛。冷却部分26适于将冷却流体吹入空间24以冷却大气。 加热器3包括管状隔热件17，发热电阻18和外壳20.发热电阻18设置在隔热材料17的内周上。外壳20设置在绝热体17的外周。 绝热体17.冷却部分26包括至少一个环形流动路径28和出口29.环形流路28设置在绝热体17和外壳20之间。出口29设置在绝热体17中。 出口29布置成确保冷却流体从出口29朝向隔热件17的垂直中心轴线或者沿着与隔热件17的垂直中心轴方向倾斜的方向吹出。
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公开(公告)号：US20080205864A1
公开(公告)日：2008-08-28
申请号：US12071909
申请日：2008-02-27
IPC分类号： F26B19/00
CPC分类号： F26B23/06 , F27B17/0025 , H01L21/67109
摘要： The present invention is a heat processing furnace comprising: a processing vessel for accommodating an object to be processed and performing thereto a heat process; and a cylindrical heater disposed to surround a circumference of the processing vessel, for heating the object to be processed; wherein: the heater includes a cylindrical heat insulating member, ribbed shelf sections that are axially formed in a tier-like manner on an inner circumference of the heat insulating member, and heating resistance wires of a helical pattern that are placed along the respective shelf sections; and pin members are arranged in the heat insulating member at suitable intervals therebetween, the pin members holding the heating resistance wires such that the heating resistance wires are movable in a radial direction of the heater, while preventing dropout of the heating resistance wires from the shelf sections.
摘要翻译： 本发明是一种热处理炉，包括：处理容器，用于容纳待加工物体并进行加热处理; 以及设置成围绕处理容器的圆周的圆柱形加热器，用于加热被处理物体; 其特征在于，所述加热器包括圆筒形绝热构件，在所述隔热构件的内周上以层状的方式轴向形成的肋状搁板部，以及沿着各个搁板部放置的螺旋图案的耐热电线 ; 并且销构件以适当的间隔布置在隔热构件中，销构件保持加热电阻线，使得加热电阻线可在加热器的径向方向上移动，同时防止加热电阻丝从搁板 部分。
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公开(公告)号：US20080232787A1
公开(公告)日：2008-09-25
申请号：US12076531
申请日：2008-03-19
IPC分类号： F26B19/00
CPC分类号： F26B23/06 , F27B17/0025 , H01L21/67109
摘要： There is provided a heat processing furnace capable of quickly increasing and decreasing a temperature, while achieving improvement in durability. A heat processing furnace 2 comprises: a processing vessel 3 for accommodating an object to be processed w and performing thereto a heat process; and a cylindrical heater 5 disposed to surround an outer circumference of the processing vessel 3, for heating the object to be processed w. The heater 5 includes a cylindrical heat insulating member 16, and heating resistors 18 arranged along an inner circumferential surface of the heat insulating member 16. Each of the heating resistors 18 is formed of a strip-shaped member that is bent into a waveform having peak portions and trough portions. Pin members 20 are arranged in the heat insulating member 16 at suitable intervals therebetween, the pin members 20 holding the heating resistor 18 such that the heating resistor 18 is movable in a radial direction of the heater.
摘要翻译： 提供能够快速增加和降低温度的热处理炉，同时实现耐久性的提高。 热处理炉2包括：处理容器3，用于容纳被处理物体w并执行加热处理; 以及围绕处理容器3的外周设置的圆筒形加热器5，用于加热待加工物体w。 加热器5包括圆柱形绝热构件16和沿着隔热构件16的内周面布置的加热电阻器18.每个加热电阻器18由弯曲成具有峰值的波形的条形构件形成 部分和谷部分。 销构件20以合适的间隔布置在绝热构件16中，销构件20保持加热电阻器18，使得加热电阻器18可沿加热器的径向移动。
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7.发明授权公开(公告)号：US08253075B2
公开(公告)日：2012-08-28
申请号：US12223162
申请日：2007-02-07
申请人： Makoto Kobayashi , Kenichi Yamaga , Takanori Saito
发明人： Makoto Kobayashi , Kenichi Yamaga , Takanori Saito
CPC分类号： H01L21/67109 , H01L21/425 , Y10T29/49083
摘要： A heat treatment apparatus with a process chamber, a tubular heater, a heat exhaust system and a cooling section. The heater surrounds an outer circumference of the process chamber. The heat exhaust system exhausts an atmosphere in a space between the heater and the process chamber. The cooling section blows a cooling fluid into the space to cool the atmosphere. The heater includes a tubular heat insulator, a heat generating resistor on an inner circumference of the heat insulator, and an outer shell provided on an outer circumference of the heat insulator. The cooling section includes at least one annular flow path between the heat insulator and the outer shell, and an outlet in the heat insulator. The outlet blows cooling fluid toward a vertical central axis of the heat insulator, or in a direction oblique to the direction toward vertical central axis of the heat insulator.
摘要翻译： 一种具有处理室，管状加热器，散热系统和冷却部分的热处理设备。 加热器围绕处理室的外周。 排热系统排出加热器和处理室之间的空间中的气氛。 冷却部分将冷却液吹入空间以冷却大气。 加热器包括管状隔热件，隔热件的内周上的发热电阻器和设置在隔热件外周上的外壳。 冷却部分包括在绝热器和外壳之间的至少一个环形流动路径以及隔热件中的出口。 出口将冷却流体吹向绝热体的垂直中心轴线，或者朝向与绝热体垂直中心轴方向倾斜的方向。
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公开(公告)号：US08023806B2
公开(公告)日：2011-09-20
申请号：US12076531
申请日：2008-03-19
IPC分类号： A21B2/00
CPC分类号： F26B23/06 , F27B17/0025 , H01L21/67109
摘要： There is provided a heat processing furnace capable of quickly increasing and decreasing a temperature, while achieving improvement in durability. A heat processing furnace 2 comprises: a processing vessel 3 for accommodating an object to be processed w and performing thereto a heat process; and a cylindrical heater 5 disposed to surround an outer circumference of the processing vessel 3, for heating the object to be processed w. The heater 5 includes a cylindrical heat insulating member 16, and heating resistors 18 arranged along an inner circumferential surface of the heat insulating member 16. Each of the heating resistors 18 is formed of a strip-shaped member that is bent into a waveform having peak portions and trough portions. Pin members 20 are arranged in the heat insulating member 16 at suitable intervals therebetween, the pin members 20 holding the heating resistor 18 such that the heating resistor 18 is movable in a radial direction of the heater.
摘要翻译： 提供能够快速增加和降低温度的热处理炉，同时实现耐久性的提高。 热处理炉2包括：处理容器3，用于容纳被处理物体w并执行加热处理; 以及围绕处理容器3的外周设置的圆筒形加热器5，用于加热待加工物体w。 加热器5包括圆柱形绝热构件16和沿着隔热构件16的内周面布置的加热电阻器18.每个加热电阻器18由弯曲成具有峰值的波形的条形构件形成 部分和谷部分。 销构件20以合适的间隔布置在绝热构件16中，销构件20保持加热电阻器18，使得加热电阻器18可沿加热器的径向移动。
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公开(公告)号：US07888622B2
公开(公告)日：2011-02-15
申请号：US11902333
申请日：2007-09-20
申请人： Ken Nakao , Kenichi Yamaga , Makoto Kobayashi
发明人： Ken Nakao , Kenichi Yamaga , Makoto Kobayashi
CPC分类号： F27B17/0025 , H01L21/67103 , H05B3/08 , Y10T29/49083
摘要： A heat-processing furnace comprises: a processing vessel for housing an object to be processed to thermally heat the object to be processed; a cylindrical heat insulating member surrounding the processing vessel; a helical heating resistor disposed along an inner circumferential surface of the heat insulating member; and support members axially disposed on the inner circumferential surface of the heat insulating member, for supporting the heating resistor at predetermined pitches. A plurality of terminal plates are disposed outside the heating resistor at suitable intervals therebetween and attached to the heating resistor, the terminal plates radially passing through the heat insulating member to be extended outside. A plurality of fixing plates are disposed outside the heating resistor at suitable intervals therebetween and attached to the heating resistor, the fixing plates being fixed in the heat insulating member. The fixing plates are attached to the heating resistor by the same attachment structure as the attachment structure of the terminal plates to the heating resistor.
摘要翻译： 一种热处理炉包括：用于容纳待加工物体的热处理容器，用于对被处理物体进行热加热; 围绕所述处理容器的圆柱形绝热构件; 螺旋加热电阻器，沿着所述绝热构件的内周面设置; 以及轴向设置在绝热构件的内周面上的支撑构件，用于以预定间距支撑加热电阻器。 多个端子板以适当的间隔设置在加热电阻器的外侧，并且附接到加热电阻器，端子板径向通过隔热构件延伸到外部。 多个固定板以适当的间隔设置在加热电阻器的外部，并附着在加热电阻器上，固定板固定在绝热构件中。 固定板通过与端子板与加热电阻器的连接结构相同的附接结构附接到加热电阻器。
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公开(公告)号：US20090194521A1
公开(公告)日：2009-08-06
申请号：US12320433
申请日：2009-01-26
申请人： Makoto Kobayashi , Kenichi Yamaga , Ken Nakao
发明人： Makoto Kobayashi , Kenichi Yamaga , Ken Nakao
IPC分类号： H05B3/06
CPC分类号： H01L21/67109 , F27B17/0025 , F27D11/02 , F27D99/0006 , H05B3/08
摘要： A thermal processing furnace comprises: a tubular heat insulation member 4 surrounding a processing vessel 3 for receiving and thermally processing an object to be processed w; a heating resistor 5 helically arranged on an inner circumferential surface of the heat insulation member 4; and a support member 13 disposed on the inner circumferential surface of the heat insulation member 4, the support member 13 supporting the heating resistor 5 such that the heating resistor 5 can be thermally expanded and thermally shrunk. The thermal processing furnace further comprises: a movement prevention member 15 disposed on the heating resistor 5 to be in contact with one side surface of the support member 13 so as to prevent a downward movement of the heating resistor 5.
摘要翻译： 热处理炉包括：围绕处理容器3的管状隔热构件4，用于接收和热处理待加工物体w; 螺旋形地布置在隔热构件4的内周面上的加热电阻器5; 以及设置在绝热构件4的内周面上的支撑构件13，支撑构件13，其支撑加热电阻器5，使得加热电阻器5可以热膨胀和热收缩。 热处理炉还包括：移动防止部件15，设置在加热电阻器5上以与支撑部件13的一个侧表面接触，以防止加热电阻器5的向下移动。
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