发明授权
- 专利标题： Heat treatment furnace and heat treatment apparatus
- 专利标题（中）： 热处理炉和热处理设备
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申请号： US13527150申请日： 2012-06-19
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公开(公告)号： US09466515B2公开(公告)日： 2016-10-11
- 发明人: Makoto Kobayashi , Kenichi Yamaga , Akira Sasaki , Daisuke Ikeda , Takahiro Koike
- 申请人： Makoto Kobayashi , Kenichi Yamaga , Akira Sasaki , Daisuke Ikeda , Takahiro Koike
- 申请人地址： JP Tokyo JP Tokyo
- 专利权人： NICHIAS CORPORATION,TOKYO ELECTRON LIMITED
- 当前专利权人： NICHIAS CORPORATION,TOKYO ELECTRON LIMITED
- 当前专利权人地址： JP Tokyo JP Tokyo
- 代理机构： Nath, Goldberg & Meyer
- 代理商 Jerald L. Meyer; Christopher Thomas
- 优先权： JP2011-137428 20110621
- 主分类号： B01J3/04
- IPC分类号： B01J3/04 ; H05B3/68 ; F27B17/00 ; C23C16/46 ; F27D1/00 ; H01L21/67
摘要：
A heat treatment furnace includes: a processing vessel configured to accommodate therein at least one object to be processed; a cylindrical heat insulating member covering a periphery of the processing vessel; and a heater disposed along an inner circumferential surface of the heat insulating member. The heater includes strip-shaped corrugated heater elements disposed along the inner circumferential surface of the heat insulating member, each of the heater elements having valley portions protruding outward and mountain portions protruding inward.
公开/授权文献
- US20120329002A1 HEAT TREATMENT FURNACE AND HEAT TREATMENT APPARATUS 公开/授权日：2012-12-27
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