发明授权
- 专利标题： Apparatus for producing trichlorosilane
- 专利标题（中）： 三氯硅烷生产设备
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申请号： US13064106申请日： 2011-03-07
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公开(公告)号： US09468042B2公开(公告)日： 2016-10-11
- 发明人: Masami Miyake , Kazuki Mizushima , Wataru Saiki , Naoya Murakami
- 申请人： Masami Miyake , Kazuki Mizushima , Wataru Saiki , Naoya Murakami
- 申请人地址： JP Tokyo
- 专利权人： MITSUBISHI MATERIALS CORPORATION
- 当前专利权人： MITSUBISHI MATERIALS CORPORATION
- 当前专利权人地址： JP Tokyo
- 代理机构： Locke Lord LLP
- 优先权： JP2010-050381 20100308
- 主分类号： H05B3/02
- IPC分类号： H05B3/02
摘要：
An apparatus for producing trichlorosilane from raw gas containing silicon tetrachloride and hydrogen, having: a reaction chamber being supplied with the raw gas for generating reacted gas containing trichlorosilane and hydrogen; a plurality of heaters heating the raw gas and having exothermic portions being disposed along a vertical direction in the reaction chamber; a plurality of electrodes being connected to basal portions of the heaters; and a radiation plate being disposed between the exothermic portions of the heaters.
公开/授权文献
- US20110215084A1 Apparatus for producing trichlorosilane 公开/授权日：2011-09-08
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