发明授权
US09472375B2 Charged particle beam device, sample stage unit, and sample observation method
有权
带电粒子束装置，样品台单元和样品观察方法
- 专利标题： Charged particle beam device, sample stage unit, and sample observation method
- 专利标题（中）： 带电粒子束装置，样品台单元和样品观察方法
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申请号： US14443293申请日： 2013-11-21
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公开(公告)号： US09472375B2公开(公告)日： 2016-10-18
- 发明人: Yusuke Ominami , Mami Konomi , Shinsuke Kawanishi , Hiroyuki Suzuki
- 申请人： Hitachi High-Technologies Corporation
- 申请人地址： JP Tokyo
- 专利权人： Hitachi High-Technologies Corporation
- 当前专利权人： Hitachi High-Technologies Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Crowell & Moring LLP
- 优先权： JP2012-254835 20121121
- 国际申请： PCT/JP2013/081411 WO 20131121
- 国际公布： WO2014/080987 WO 20140530
- 主分类号： G21K5/04
- IPC分类号： G21K5/04 ; H01J37/26 ; H01J37/20 ; H01J37/16 ; H01J37/28 ; H01J37/22
摘要：
A charged particle beam device provided with: a charged particle optical lens column generating a primary charged particle beam; a housing which has its inside evacuated by a vacuum pump; a first diaphragm that forms a part of the housing and able to keep an airtight state of the interior space of the housing; and a second diaphragm disposed between the first diaphragm and the sample, wherein a primary charged particle beam generated by the charged particle optical lens column is transmitted by or passes through the first diaphragm and the second diaphragm, and then is irradiated, on the sample that is in contact with the second diaphragm.