Invention Grant
US09472375B2 Charged particle beam device, sample stage unit, and sample observation method
有权
带电粒子束装置，样品台单元和样品观察方法
- Patent Title: Charged particle beam device, sample stage unit, and sample observation method
- Patent Title (中): 带电粒子束装置，样品台单元和样品观察方法
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Application No.: US14443293Application Date: 2013-11-21
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Publication No.: US09472375B2Publication Date: 2016-10-18
- Inventor: Yusuke Ominami , Mami Konomi , Shinsuke Kawanishi , Hiroyuki Suzuki
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2012-254835 20121121
- International Application: PCT/JP2013/081411 WO 20131121
- International Announcement: WO2014/080987 WO 20140530
- Main IPC: G21K5/04
- IPC: G21K5/04 ; H01J37/26 ; H01J37/20 ; H01J37/16 ; H01J37/28 ; H01J37/22
Abstract:
A charged particle beam device provided with: a charged particle optical lens column generating a primary charged particle beam; a housing which has its inside evacuated by a vacuum pump; a first diaphragm that forms a part of the housing and able to keep an airtight state of the interior space of the housing; and a second diaphragm disposed between the first diaphragm and the sample, wherein a primary charged particle beam generated by the charged particle optical lens column is transmitted by or passes through the first diaphragm and the second diaphragm, and then is irradiated, on the sample that is in contact with the second diaphragm.
Public/Granted literature
- US20150311033A1 Charged Particle Beam Device, Sample Stage Unit, and Sample Observation Method Public/Granted day:2015-10-29
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