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25 条记录 (耗时 0.018 秒)

    Electron scanning microscope and image generation method
    1.
    发明授权
    Electron scanning microscope and image generation method 有权

    公开(公告)号：US10157724B2

    公开(公告)日：2018-12-18

    申请号：US15855370

    申请日：2017-12-27

    申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

    发明人： Shinsuke Kawanishi ,  Yusuke Ominami

    IPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/28

    摘要： In a scanning electron microscope, an atmospheric pressure space having a specimen arranged therein and a vacuum space arranged on a charged particle optical system side are isolated from each other using an isolation film that transmits charged particle beams. The scanning electron microscope has an electron optical lens barrel, a chassis, and an isolation film. The electron optical lens barrel radiates a primary electron beam onto a specimen. The chassis is directly bonded to the inside of the electron optical lens barrel and has an inside that turns into a lower vacuum state than the inside of the electron optical lens barrel at least during the radiation of the primary electron beam. The isolation film isolates a space in an atmospheric pressure atmosphere having a specimen mounted therein and the inside of the chassis in a lower vacuum state, and transmits the primary charged particle beam.

    Sample storage container, charged particle beam apparatus, and image acquiring method
    4.
    发明授权
    Sample storage container, charged particle beam apparatus, and image acquiring method 有权
    样品储存容器，带电粒子束装置和图像获取方法

    公开(公告)号：US09564288B2

    公开(公告)日：2017-02-07

    申请号：US14438691

    申请日：2013-10-29

    申请人： Hitachi High-Technologies Corporation

    发明人： Yusuke Ominami ,  Shinsuke Kawanishi ,  Hiroyuki Suzuki

    IPC分类号： H01J37/16 ,  H01J37/20 ,  H01J37/28

    CPC分类号： H01J37/16 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006 ,  H01J2237/20221 ,  H01J2237/20235 ,  H01J2237/28

    摘要： A sample storage container of the present invention includes: a storage container (100) that stores a sample (6) under an atmosphere different from an atmosphere of an outside; a diaphragm (10) through which a charged particle beam passes through or transmits; a sample stage (103) that is arranged inside the storage container (100) and that is capable of moving a relative position of the sample (6) to the diaphragm (10) in a horizontal direction and in a vertical direction under an atmospheric state where the atmospheric states inside the storage container and outside the storage container are different each other; and an operating section (104) that moves the sample stage (103) from an outside of the storage container (100), wherein the sample storage container is set in a state where the sample (6) is stored in a vacuum chamber of a charged particle beam apparatus.

    摘要翻译： 本发明的样品储存容器包括：储存容器（100），其在不同于外部气氛的气氛下存储样品（6）; 带电粒子束穿过或透过的隔膜（10）; 布置在储存容器（100）的内部并且能够在大气压下沿水平方向和垂直方向将样品（6）的相对位置移动到隔膜（10）的样品台（103） 存储容器内部和储存容器外的大气状态彼此不同; 以及从所述存储容器（100）的外部移动所述样品台（103）的操作部（104），其中，所述样本收纳容器被设定为将样品（6）储存在所述储存容器 带电粒子束装置。

    Charged particle beam device, sample stage unit, and sample observation method
    5.
    发明授权
    Charged particle beam device, sample stage unit, and sample observation method 有权
    带电粒子束装置，样品台单元和样品观察方法

    公开(公告)号：US09472375B2

    公开(公告)日：2016-10-18

    申请号：US14443293

    申请日：2013-11-21

    申请人： Hitachi High-Technologies Corporation

    发明人： Yusuke Ominami ,  Mami Konomi ,  Shinsuke Kawanishi ,  Hiroyuki Suzuki

    IPC分类号： G21K5/04 ,  H01J37/26 ,  H01J37/20 ,  H01J37/16 ,  H01J37/28 ,  H01J37/22

    CPC分类号： H01J37/20 ,  H01J37/16 ,  H01J37/224 ,  H01J37/28 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2608 ,  H01J2237/28

    摘要： A charged particle beam device provided with: a charged particle optical lens column generating a primary charged particle beam; a housing which has its inside evacuated by a vacuum pump; a first diaphragm that forms a part of the housing and able to keep an airtight state of the interior space of the housing; and a second diaphragm disposed between the first diaphragm and the sample, wherein a primary charged particle beam generated by the charged particle optical lens column is transmitted by or passes through the first diaphragm and the second diaphragm, and then is irradiated, on the sample that is in contact with the second diaphragm.

    摘要翻译： 一种带电粒子束装置，具有：产生初级带电粒子束的带电粒子光学透镜柱; 其内部通过真空泵抽真空的壳体; 第一隔膜，其形成所述壳体的一部分并且能够保持所述壳体的内部空间的气密状态; 以及设置在第一膜片和样品之间的第二膜片，其中由带电粒子光学透镜柱产生的初级带电粒子束通过第一膜片和第二膜片透过或通过第一膜片和第二膜片，然后照射在样品上， 与第二隔膜接触。

    Observation Apparatus and Optical Axis Adjustment Method
    6.
    发明申请
    Observation Apparatus and Optical Axis Adjustment Method 有权
    观察装置和光轴调整方法

    公开(公告)号：US20150228448A1

    公开(公告)日：2015-08-13

    申请号：US14422531

    申请日：2013-07-01

    申请人： Hitachi High-Technologies Corporation

    发明人： Yusuke Ominami ,  Mami Konomi ,  Shinsuke Kawanishi ,  Sukehiro Ito

    IPC分类号： H01J37/18 ,  H01J37/09 ,  H01J37/26

    CPC分类号： H01J37/18 ,  H01J37/04 ,  H01J37/09 ,  H01J37/16 ,  H01J37/20 ,  H01J37/228 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/045 ,  H01J2237/164 ,  H01J2237/1825 ,  H01J2237/2602 ,  H01J2237/2605

    摘要： Ordinary charged particle beam apparatuses have each been an apparatus manufactured for dedicated use in making observations in a gas atmosphere at atmospheric pressure or at a pressure substantially equal thereto. There have existed no devices capable of simply making observations using an ordinary high-vacuum charged particle microscope in a gas atmosphere at atmospheric pressure or at a pressure approximately equal thereto. Furthermore, ordinary techniques have been incapable of observing the same spot of the sample in such an atmosphere using a charged particle beam and light simultaneously. This invention thus provides an apparatus including: a charged particle optical tube that irradiates a sample with a primary charged particle beam; a vacuum pump that evacuates the inside of the charged particle optical tube; a diaphragm arranged to separate a space in which the sample is placed from the charged particle optical tube, the diaphragm being detachable and allowing the primary charged particle beam to permeate or pass therethrough; and an optical microscope positioned on the opposite side of the charged particle optical tube across the diaphragm and the sample, the optical microscope having an optical axis thereof aligned with at least part of an extension of the optical axis of the charged particle optical tube.

    摘要翻译： 普通带电粒子束装置各自是制造用于在大气压或基本上等于其的压力下在气体气氛中进行观察的专用制造装置。 在大气压或大致相等的压力下，不存在使用普通的高真空带电粒子显微镜简单地进行观察的装置。 此外，普通技术已经不能使用带电粒子束和光同时在这样的大气中观察样品的相同点。 因此，本发明提供了一种装置，包括：带有电荷的粒子束照射样品的带电粒子光管; 抽真空带电粒子光管内部的真空泵; 隔膜，布置成将带有样品的空间与带电粒子光管分离，隔膜可拆卸并允许初级带电粒子束渗透或通过; 以及光学显微镜，其位于带电粒子光管的横跨隔膜和样品的相反侧，光学显微镜的光轴与带电粒子光管的光轴的延伸部分的至少一部分对准。

    Charged Particle Beam Apparatus
    7.
    发明申请
    Charged Particle Beam Apparatus 审中-公开
    带电粒子束装置

    公开(公告)号：US20150213999A1

    公开(公告)日：2015-07-30

    申请号：US14422454

    申请日：2013-07-01

    申请人： Hitachi High-Technologies Corporation

    发明人： Yusuke Ominami ,  Noriyuki Sakuma ,  Shinsuke Kawanishi ,  Masahiko Ajima ,  Sukehiro Ito

    IPC分类号： H01J37/16 ,  H01J37/26

    CPC分类号： H01J37/16 ,  H01J37/18 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/2605

    摘要： The ordinary charged particle beam apparatus works on the assumption that signals are detected while its diaphragm and the sample are being positioned close to each other. This structure is not suitable for observing a sample with a prominently uneven surface in a gas atmosphere at atmospheric pressure or at a pressure substantially equal thereto. The present invention provides a charged particle beam apparatus that separates its charged particle optical tube from the space in which the sample is placed. The apparatus includes a detachable diaphragm that lets a primary charged particle beam permeate or pass therethrough. Installed in the space where the sample is placed is a detector that detects secondary particles discharged from the sample irradiated with the primary charged particle beam.

    摘要翻译： 普通带电粒子束装置的工作原理是在其膜片和样品彼此靠近的位置检测信号。 该结构不适用于在大气压或与其基本相等的压力的气体气氛中观察具有显着不平坦表面的样品。 本发明提供一种带电粒子束装置，其将带电粒子光学管与其中放置样品的空间分离。 该装置包括一个可拆卸的隔膜，使一次带电粒子束透过或通过。 安装在放置样品的空间中的检测器是用于检测从初次带电粒子束照射的样品排出的二次粒子的检测器。