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公开(公告)号：US09373480B2
公开(公告)日：2016-06-21
申请号：US14782695
申请日：2014-03-05
CPC分类号： H01J37/16 , H01J37/026 , H01J37/18 , H01J37/20 , H01J37/26 , H01J2237/0213 , H01J2237/022 , H01J2237/2003 , H01J2237/2006
摘要： In a SEM device which enables observations under an atmospheric pressure, in the event that a diaphragm is damaged during an observation of a sample, air flows into a charged particle optical barrel from the vicinity of the sample, due to the differential pressure between the inside of the charged particle optical barrel under vacuum and the vicinity of the sample under the atmospheric pressure. At this time, the sample may be sucked into the charged particle optical barrel. In this case, a charged particle optical system and a detector are contaminated thereby, which causes performance degradation or failures of the charged particle microscope. For coping therewith, it is necessary to prevent the charged particle optical barrel from being contaminated, without inducing a time lag, with a simple structure. In a charged particle beam device adapted to place a sample in a non-vacuum environment, there is provided a filter member which is placed on the path of a primary charged particle beam at least in a state where the primary charged particle beam is directed to the sample and, further, is adapted to transmit or pass, therethrough, the primary charged particle beam and secondary charged particles derived from the sample, while intercepting at least a portion of a scattering substance which is scattered in the event of a fracture of the diaphragm.
摘要翻译： 在能够在大气压下进行观察的SEM装置中，在样品观察期间膜片损伤的情况下，由于内部的压差，空气从样品附近流入带电粒子光学镜筒 的带电粒子光学筒在真空下和样品在大气压附近。 此时，样品可以被吸入带电粒子光学筒中。 在这种情况下，带电粒子光学系统和检测器被污染，导致带电粒子显微镜的性能下降或失效。 为了应对，需要以简单的结构防止带电粒子光学筒被污染，而不会引起时间滞后。 在适于将样品置于非真空环境中的带电粒子束装置中，设置有过滤构件，其至少在初级带电粒子束被引导到 样品，并且还适于透射或通过从样品衍生的初级带电粒子束和二次带电粒子，同时截留至少一部分在发生断裂的情况下散射的散射物质 隔膜
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2.发明申请Charged Particle Beam Device, Position Adjusting Method for Diaphragm, and Diaphragm Position Adjusting Jig 有权带电粒子束装置，隔膜位置调节方法和隔膜位置调节夹具公开(公告)号：US20150228449A1
公开(公告)日：2015-08-13
申请号：US14431061
申请日：2013-09-25
CPC分类号： H01J37/20 , H01J37/16 , H01J37/18 , H01J2237/164 , H01J2237/2608
摘要： In a charged particle beam device that performs observation of a sample under a gas environment in atmospheric pressure or pressure substantially equal to the atmospheric pressure, a diaphragm that separates an atmospheric pressure space, in which the sample is placed, and a vacuum space in an interior of an electron optical lens barrel is made very thin in order to allow an electron beam to transmit therethrough and damaged with a high possibility. Although at the time of replacing the diaphragm, it is necessary to adjust a position of a diaphragm, it is impossible to easily perform the adjustment of the position of the diaphragm by a conventional method. In a charged particle beam device with a configuration in which a thin film that separates a vacuum environment and an atmospheric environment or a gas environment is employed, a detachable diaphragm that partitions a space, in which a sample is placed, in such a manner that pressure in the space in which the sample is placed is maintained at a level larger than pressure in an interior of a housing, and that allows transmission or passage of a primary charged particle beam therethrough, and a movable member that can move the diaphragm in a state where the pressure in the space, in which the sample is placed, and the pressure in the interior of the housing are maintained as they are, are provided.
摘要翻译： 在大气压或基本上等于大气压的气体环境下对样品进行观察的带电粒子束装置中，分离放置样品的大气压力空间的膜片和 电子光学镜筒的内部被制成非常薄，以便允许电子束透射并且以很高的可能性被损坏。 虽然在更换隔膜时，需要调节隔膜的位置，但是不可能通过常规方法容易地进行隔膜位置的调节。 在采用分离真空环境和大气环境或气体环境的薄膜的结构的带电粒子束装置中，可以将放置样品的空间分隔开的可拆卸隔膜， 放置样品的空间中的压力保持在比壳体内部的压力大的水平面上，并且允许一次带电粒子束通过其的传播或通过;以及可移动膜片的可动件， 提供其中放置样品的空间中的压力以及壳体内部的压力原样保持的状态。
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公开(公告)号：USD730962S1
公开(公告)日：2015-06-02
申请号：US29484245
申请日：2014-03-07
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4.发明授权Sample storage container, charged particle beam apparatus, and image acquiring method 有权样品储存容器，带电粒子束装置和图像获取方法公开(公告)号：US09564288B2
公开(公告)日：2017-02-07
申请号：US14438691
申请日：2013-10-29
CPC分类号： H01J37/16 , H01J37/20 , H01J37/28 , H01J2237/164 , H01J2237/182 , H01J2237/188 , H01J2237/2003 , H01J2237/2006 , H01J2237/20221 , H01J2237/20235 , H01J2237/28
摘要： A sample storage container of the present invention includes: a storage container (100) that stores a sample (6) under an atmosphere different from an atmosphere of an outside; a diaphragm (10) through which a charged particle beam passes through or transmits; a sample stage (103) that is arranged inside the storage container (100) and that is capable of moving a relative position of the sample (6) to the diaphragm (10) in a horizontal direction and in a vertical direction under an atmospheric state where the atmospheric states inside the storage container and outside the storage container are different each other; and an operating section (104) that moves the sample stage (103) from an outside of the storage container (100), wherein the sample storage container is set in a state where the sample (6) is stored in a vacuum chamber of a charged particle beam apparatus.
摘要翻译： 本发明的样品储存容器包括：储存容器（100），其在不同于外部气氛的气氛下存储样品（6）; 带电粒子束穿过或透过的隔膜（10）; 布置在储存容器（100）的内部并且能够在大气压下沿水平方向和垂直方向将样品（6）的相对位置移动到隔膜（10）的样品台（103） 存储容器内部和储存容器外的大气状态彼此不同; 以及从所述存储容器（100）的外部移动所述样品台（103）的操作部（104），其中，所述样本收纳容器被设定为将样品（6）储存在所述储存容器 带电粒子束装置。
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5.发明授权Charged particle beam device, sample stage unit, and sample observation method 有权带电粒子束装置，样品台单元和样品观察方法公开(公告)号：US09472375B2
公开(公告)日：2016-10-18
申请号：US14443293
申请日：2013-11-21
CPC分类号： H01J37/20 , H01J37/16 , H01J37/224 , H01J37/28 , H01J2237/2002 , H01J2237/2003 , H01J2237/2004 , H01J2237/2608 , H01J2237/28
摘要： A charged particle beam device provided with: a charged particle optical lens column generating a primary charged particle beam; a housing which has its inside evacuated by a vacuum pump; a first diaphragm that forms a part of the housing and able to keep an airtight state of the interior space of the housing; and a second diaphragm disposed between the first diaphragm and the sample, wherein a primary charged particle beam generated by the charged particle optical lens column is transmitted by or passes through the first diaphragm and the second diaphragm, and then is irradiated, on the sample that is in contact with the second diaphragm.
摘要翻译： 一种带电粒子束装置，具有：产生初级带电粒子束的带电粒子光学透镜柱; 其内部通过真空泵抽真空的壳体; 第一隔膜，其形成所述壳体的一部分并且能够保持所述壳体的内部空间的气密状态; 以及设置在第一膜片和样品之间的第二膜片，其中由带电粒子光学透镜柱产生的初级带电粒子束通过第一膜片和第二膜片透过或通过第一膜片和第二膜片，然后照射在样品上， 与第二隔膜接触。
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公开(公告)号：USD711950S1
公开(公告)日：2014-08-26
申请号：US29456329
申请日：2013-05-30
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公开(公告)号：US09633817B2
公开(公告)日：2017-04-25
申请号：US14911681
申请日：2014-03-10
CPC分类号： H01J37/20 , G01M3/02 , H01J37/16 , H01J37/18 , H01J37/26 , H01J37/28 , H01J2237/188 , H01J2237/2002 , H01J2237/2006 , H01J2237/2605 , H01J2237/2608 , H01J2237/2802
摘要： Conventional devices have been difficult to use due to insufficient consideration being given to factors such as the cost necessary for diaphragm replacement and the convenience of the work. In the present invention, a diaphragm mounting member installed in a charged particle beam device for radiating a primary charged particle beam through a diaphragm separating a vacuum space and an atmospheric pressure space onto a sample placed in the atmospheric pressure space is provided with a diaphragm installation portion to which a TEM membrane is mounted and a casing fixing portion mounted on a casing of the charged particle beam device. The diaphragm installation portion has a positioning structure for positioning a platform on which the diaphragm is held.
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公开(公告)号：US09362083B2
公开(公告)日：2016-06-07
申请号：US14420942
申请日：2013-07-08
CPC分类号： H01J37/18 , H01J37/16 , H01J37/20 , H01J37/261 , H01J37/28 , H01J2237/1825 , H01J2237/2448 , H01J2237/2602 , H01J2237/2605
摘要： There is provided a charged particle beam apparatus having the function of permitting observation of a sample in a gas atmosphere or in a liquid state, the apparatus being intended to let a dry sample be observed as it is getting saturated with an introduced liquid and to prevent a charged particle beam from getting scattered by an unwanted liquid introduced between a diaphragm and the sample. This invention provides a structure including an inlet-outlet part (300) that brings in and out a desired liquid or gas in the direction of the underside or the side of the sample (6), the structure being arranged so that the sample (6) is irradiated with a primary charged particle beam while the sample (6) and the diaphragm (10) are kept out of contact with each other.
摘要翻译： 提供了具有允许在气体气氛或液体状态下观察样品的功能的带电粒子束装置，该装置旨在使干燥的样品在被引入的液体饱和时被观察，并且防止 带电粒子束由于在膜片和样品之间引入的不需要的液体而被散射。 本发明提供了一种结构，其包括入口 - 出口部分（300），该入口 - 出口部分（300）沿着样品（6）的下侧或侧面的方向引入和排出所需的液体或气体，该结构被布置成使得样品 ）在样品（6）和隔膜（10）彼此不接触的同时用初级带电粒子束照射。
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9.发明授权Charged particle beam device, position adjusting method for diaphragm, and diaphragm position adjusting jig 有权带电粒子束装置，隔膜位置调整方法和隔膜位置调整夹具公开(公告)号：US09251996B2
公开(公告)日：2016-02-02
申请号：US14431061
申请日：2013-09-25
CPC分类号： H01J37/20 , H01J37/16 , H01J37/18 , H01J2237/164 , H01J2237/2608
摘要： In a charged particle beam device that performs observation of a sample under a gas environment in atmospheric pressure or pressure substantially equal to the atmospheric pressure, a diaphragm that separates an atmospheric pressure space, in which the sample is placed, and a vacuum space in an interior of an electron optical lens barrel is made very thin in order to allow an electron beam to transmit therethrough and damaged with a high possibility. Although at the time of replacing the diaphragm, it is necessary to adjust a position of a diaphragm, it is impossible to easily perform the adjustment of the position of the diaphragm by a conventional method. In a charged particle beam device with a configuration in which a thin film that separates a vacuum environment and an atmospheric environment or a gas environment is employed, a detachable diaphragm that partitions a space, in which a sample is placed, in such a manner that pressure in the space in which the sample is placed is maintained at a level larger than pressure in an interior of a housing, and that allows transmission or passage of a primary charged particle beam therethrough, and a movable member that can move the diaphragm in a state where the pressure in the space, in which the sample is placed, and the pressure in the interior of the housing are maintained as they are, are provided.
摘要翻译： 在大气压或基本上等于大气压的气体环境下对样品进行观察的带电粒子束装置中，分离放置样品的大气压力空间的膜片和 电子光学镜筒的内部被制成非常薄，以便允许电子束透射并且以很高的可能性被损坏。 虽然在更换隔膜时，需要调节隔膜的位置，但是不可能通过常规方法容易地进行隔膜位置的调节。 在采用分离真空环境和大气环境或气体环境的薄膜的结构的带电粒子束装置中，可以将放置样品的空间分隔开的可拆卸隔膜， 放置样品的空间中的压力保持在比壳体内部的压力大的水平面上，并且允许一次带电粒子束通过其的传播或通过;以及可移动膜片的可动件， 提供其中放置样品的空间中的压力以及壳体内部的压力原样保持的状态。
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公开(公告)号：US20150221470A1
公开(公告)日：2015-08-06
申请号：US14420942
申请日：2013-07-08
CPC分类号： H01J37/18 , H01J37/16 , H01J37/20 , H01J37/261 , H01J37/28 , H01J2237/1825 , H01J2237/2448 , H01J2237/2602 , H01J2237/2605
摘要： There is provided a charged particle beam apparatus having the function of permitting observation of a sample in a gas atmosphere or in a liquid state, the apparatus being intended to let a dry sample be observed as it is getting saturated with an introduced liquid and to prevent a charged particle beam from getting scattered by an unwanted liquid introduced between a diaphragm and the sample. This invention provides a structure including an inlet-outlet part (300) that brings in and out a desired liquid or gas in the direction of the underside or the side of the sample (6), the structure being arranged so that the sample (6) is irradiated with a primary charged particle beam while the sample (6) and the diaphragm (10) are kept out of contact with each other.
摘要翻译： 提供了具有允许在气体气氛或液体状态下观察样品的功能的带电粒子束装置，该装置旨在使干燥的样品在被引入的液体饱和时被观察，并且防止 带电粒子束由于在膜片和样品之间引入的不需要的液体而被散射。 本发明提供了一种结构，其包括入口 - 出口部分（300），该入口 - 出口部分（300）沿着样品（6）的下侧或侧面的方向引入和排出所需的液体或气体，该结构被布置成使得样品 ）在样品（6）和隔膜（10）彼此不接触的同时用初级带电粒子束照射。
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