Invention Grant
- Patent Title: Semiconductor device and method of forming repassivation layer with reduced opening to contact pad of semiconductor die
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Application No.: US14284752Application Date: 2014-05-22
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Publication No.: US09472452B2Publication Date: 2016-10-18
- Inventor: Yaojian Lin , Kang Chen , Jianmin Fang , Xia Feng
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/56 ; H01L23/31 ; H01L23/498 ; H01L23/538 ; H01L23/00 ; H01L23/522

Abstract:
A semiconductor wafer has a plurality of first semiconductor die. A first conductive layer is formed over an active surface of the die. A first insulating layer is formed over the active surface and first conductive layer. A repassivation layer is formed over the first insulating layer and first conductive layer. A via is formed through the repassivation layer to the first conductive layer. The semiconductor wafer is singulated to separate the semiconductor die. The semiconductor die is mounted to a temporary carrier. An encapsulant is deposited over the semiconductor die and carrier. The carrier is removed. A second insulating layer is formed over the repassivation layer and encapsulant. A second conductive layer is formed over the repassivation layer and first conductive layer. A third insulating layer is formed over the second conductive layer and second insulating layer. An interconnect structure is formed over the second conductive layer.
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