Invention Grant
- Patent Title: Method for removing liquid membrane using high-speed particle beam
- Patent Title (中): 使用高速粒子束去除液膜的方法
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Application No.: US14652045Application Date: 2013-10-25
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Publication No.: US09476642B2Publication Date: 2016-10-25
- Inventor: In Ho Kim , Jin Won Lee
- Applicant: POSTECH ACADEMY-INDUSTRY FOUNDATION
- Applicant Address: KR Pohang-si, Gyeongsangbuk-do
- Assignee: POSTECH ACADEMY-INDUSTRY FOUNDATION
- Current Assignee: POSTECH ACADEMY-INDUSTRY FOUNDATION
- Current Assignee Address: KR Pohang-si, Gyeongsangbuk-do
- Agency: LRK Patent Law Firm
- Priority: KR10-2012-0148974 20121218
- International Application: PCT/KR2013/009555 WO 20131025
- International Announcement: WO2014/098365 WO 20140626
- Main IPC: F26B21/06
- IPC: F26B21/06 ; F26B5/00 ; B08B3/04 ; F26B19/00 ; F26B3/36 ; F26B5/04 ; B24C1/00 ; F26B3/34
Abstract:
A method for removing a liquid membrane using a high-speed particle beam includes a wet washing step of washing an object by using a washing solution, and a dry washing step of simultaneously removing the washing solution remaining on the object and pollutants or foreign substances in the washing solution by spraying sublimation particles.
Public/Granted literature
- US20150323252A1 METHOD FOR REMOVING LIQUID MEMBRANE USING HIGH-SPEED PARTICLE BEAM Public/Granted day:2015-11-12
Information query
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