Abstract:
A nozzle, a device, and a method for high-speed generation of uniform nanoparticles allow a particle generation gas formed of carbon dioxide to pass through the nozzle, thereby forming uniform nanoparticles at high speed. An orifice that adjusts an opening and closing cross-sectional area of a throat of the nozzle is provided to cause uniform nuclei generation without an additional cooling device, a dilating portion that has a cross-sectional area and a dilation angle increasing toward an outlet side of the nozzle is provided to grow the nuclei through a first dilation portion (having a relatively gradual dilation angle) and thus cause particle generation, and the generated particles are accelerated through a second dilating portion that has a steeper dilation angle than the first dilating portion.
Abstract:
A method for removing a liquid membrane using a high-speed particle beam includes a wet washing step of washing an object by using a washing solution, and a dry washing step of simultaneously removing the washing solution remaining on the object and pollutants or foreign substances in the washing solution by spraying sublimation particles.
Abstract:
A nozzle, a device, and a method for high-speed generation of uniform nanoparticles allow a particle generation gas formed of carbon dioxide to pass through the nozzle, thereby forming uniform nanoparticles at high speed. An orifice that adjusts an opening and closing cross-sectional area of a throat of the nozzle is provided to cause uniform nuclei generation without an additional cooling device, a dilating portion that has a cross-sectional area and a dilation angle increasing toward an outlet side of the nozzle is provided to grow the nuclei through a first dilation portion (having a relatively gradual dilation angle) and thus cause particle generation, and the generated particles are accelerated through a second dilating portion that has a steeper dilation angle than the first dilating portion.