Invention Grant
US09476927B2 Structure and method to determine through silicon via build integrity 有权
通过构建完整性确定硅的结构和方法

Structure and method to determine through silicon via build integrity
Abstract:
A structure to detect changes in the integrity of vertical electrical connection structures including a semiconductor layer and an electrically conductive material extending through an entire depth of the semiconductor layer. The electrically conductive material has a geometry that encloses a pedestal portion of the semiconductor layer within an interior perimeter of the electrically conductive material. At least one semiconductor device is present on the pedestal portion of the semiconductor layer within the perimeter of the electrically conductive material.
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