Invention Grant
- Patent Title: Structure and method to determine through silicon via build integrity
- Patent Title (中): 通过构建完整性确定硅的结构和方法
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Application No.: US14161309Application Date: 2014-01-22
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Publication No.: US09476927B2Publication Date: 2016-10-25
- Inventor: Troy L. Graves-Abe , Chandrasekharan Kothandaraman , Conal E. Murray
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GlobalFoundries, Inc.
- Current Assignee: GlobalFoundries, Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Yuanmin Cai
- Main IPC: G01R31/02
- IPC: G01R31/02 ; H01L21/66 ; H01L23/48 ; G01R31/26 ; G01M5/00

Abstract:
A structure to detect changes in the integrity of vertical electrical connection structures including a semiconductor layer and an electrically conductive material extending through an entire depth of the semiconductor layer. The electrically conductive material has a geometry that encloses a pedestal portion of the semiconductor layer within an interior perimeter of the electrically conductive material. At least one semiconductor device is present on the pedestal portion of the semiconductor layer within the perimeter of the electrically conductive material.
Public/Granted literature
- US20150204932A1 STRUCTURE AND METHOD TO DETERMINE THROUGH SILICON VIA BUILD INTEGRITY Public/Granted day:2015-07-23
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