Invention Grant
- Patent Title: Method of manufacturing elastic wave device
- Patent Title (中): 制造弹性波装置的方法
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Application No.: US14488447Application Date: 2014-09-17
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Publication No.: US09484885B2Publication Date: 2016-11-01
- Inventor: Munehisa Watanabe , Hideki Iwamoto , Hajime Kando , Syunsuke Kido
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2010-288453 20101224
- Main IPC: H03H9/54
- IPC: H03H9/54 ; H03H3/02 ; H03H3/04 ; H03H3/08 ; H01L41/04 ; H01L41/047 ; H03H9/02 ; H03H3/10

Abstract:
A method for manufacturing an elastic wave device includes a step of preparing a supporting substrate, a step of forming a high-acoustic-velocity film on the supporting substrate and in which an acoustic velocity of a bulk wave propagating therein is higher than an acoustic velocity of an elastic wave propagating in a piezoelectric film, a step of forming a low-acoustic-velocity film on the high-acoustic-velocity film and in which an acoustic velocity of a bulk wave propagating therein is lower than an acoustic velocity of a bulk wave propagating in the piezoelectric film, a step of forming the piezoelectric film on the low-acoustic-velocity film, and a step of forming an IDT electrode on a surface of the piezoelectric film.
Public/Granted literature
- US20150033521A1 ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2015-02-05
Information query
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