Invention Grant
- Patent Title: Coatings for relatively movable surfaces
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Application No.: US14844779Application Date: 2015-09-03
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Publication No.: US09487397B2Publication Date: 2016-11-08
- Inventor: William Robert Morrison , Mark Christopher Fisher , Murali Hanabe , Ganapathy Subramaniam Sivakumar , Simon Joshua Jacobs
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Michael A. Davis, Jr.; Frank D. Cimino
- Main IPC: H01L21/322
- IPC: H01L21/322 ; B81C1/00 ; B81B7/00 ; H04W4/02 ; H01L21/02 ; B81B3/00
Abstract:
A device has a microelectromechanical system (MEMS) component with at least one surface and a coating disposed on at least a portion of the surface. The coating has a compound of the formula M(CnF2n+1Or), wherein M is a polar head group and wherein n≧2r. The value of n may range from 2 to about 20, and the value of r may range from 1 to about 10. The value of n plus r may range from 3 to about 30, and a ratio of n:r may have a value of about 2:1 to about 20:1.
Public/Granted literature
- US20160060108A1 COATINGS FOR RELATIVELY MOVABLE SURFACES Public/Granted day:2016-03-03
Information query
IPC分类:
