发明授权
US09487429B2 Plasma deposition process for producing an optical preform with a cladding glass layer of fluorine-doped quartz glass 有权
用于制造具有氟掺杂石英玻璃的包层玻璃层的光学预制件的等离子体沉积工艺

Plasma deposition process for producing an optical preform with a cladding glass layer of fluorine-doped quartz glass
摘要:
In plasma deposition processes for producing an optical preform according to the POD method, a cladding glass layer composed of fluorine-doped quartz glass is produced by means of a plasma torch on a cylindrical substrate body composed of quartz glass, said substrate body rotating about the longitudinal axis thereof. In this case, the plasma torch performs a reversing relative movement between two turning points (A; B) along the substrate body. In order, proceeding therefrom, to achieve a high fluorine doping in conjunction with a dopant distribution that is as uniform as possible axially, the invention proposes that a heat element has a heating effect on the region of one turning point (A; B) when the plasma torch is situated in the region of the other turning point (B; A).
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