发明授权
US09487429B2 Plasma deposition process for producing an optical preform with a cladding glass layer of fluorine-doped quartz glass
有权
用于制造具有氟掺杂石英玻璃的包层玻璃层的光学预制件的等离子体沉积工艺
- 专利标题: Plasma deposition process for producing an optical preform with a cladding glass layer of fluorine-doped quartz glass
- 专利标题(中): 用于制造具有氟掺杂石英玻璃的包层玻璃层的光学预制件的等离子体沉积工艺
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申请号: US14233104申请日: 2012-07-26
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公开(公告)号: US09487429B2公开(公告)日: 2016-11-08
- 发明人: Andreas Schultheis , Karsten Bräuer , Richard Schmidt
- 申请人: Andreas Schultheis , Karsten Bräuer , Richard Schmidt
- 申请人地址: DE Hanau
- 专利权人: Heraeus Quarzglas GmbH & Co. KG
- 当前专利权人: Heraeus Quarzglas GmbH & Co. KG
- 当前专利权人地址: DE Hanau
- 代理机构: Tiajoloff & Kelly LLP
- 优先权: DE102011108612 20110727
- 国际申请: PCT/EP2012/064748 WO 20120726
- 国际公布: WO2013/014258 WO 20130131
- 主分类号: C03B37/014
- IPC分类号: C03B37/014
摘要:
In plasma deposition processes for producing an optical preform according to the POD method, a cladding glass layer composed of fluorine-doped quartz glass is produced by means of a plasma torch on a cylindrical substrate body composed of quartz glass, said substrate body rotating about the longitudinal axis thereof. In this case, the plasma torch performs a reversing relative movement between two turning points (A; B) along the substrate body. In order, proceeding therefrom, to achieve a high fluorine doping in conjunction with a dopant distribution that is as uniform as possible axially, the invention proposes that a heat element has a heating effect on the region of one turning point (A; B) when the plasma torch is situated in the region of the other turning point (B; A).
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