Invention Grant
- Patent Title: Biosensor with a sensing surface on an interlayer dielectric
- Patent Title (中): 生物传感器在层间电介质上具有感测表面
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Application No.: US14573162Application Date: 2014-12-17
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Publication No.: US09488615B2Publication Date: 2016-11-08
- Inventor: Chun-Wen Cheng , Fei-Lung Lai , Chia-Hua Chu , Yi-Hsien Chang , Hsin-Chieh Huang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: G01N27/414
- IPC: G01N27/414 ; H01L23/498 ; H01L21/48

Abstract:
The present disclosure relates to an integrated chip having an integrated bio-sensor having horizontal and vertical sensing surfaces. In some embodiments, the integrated chip has a sensing device disposed within a semiconductor substrate. A back-end-of the line (BEOL) metallization stack with a plurality of metal interconnect layers electrically coupled to the sensing device is arranged within an inter-level dielectric (ILD) layer overlying the semiconductor substrate. A sensing well is located within a top surface of the ILD layer. The sensing well has a horizontal sensing surface extending along a top surface of a first one of the plurality of metal interconnect layers and a vertical sensing surface extending along a sidewall of a second one of the plurality of metal interconnect layers overlying the first one of the plurality of metal interconnect layers. The use of both horizontal and vertical sensing surfaces enables more accurate sensing.
Public/Granted literature
- US20160178568A1 INTEGRATED BIOSENSOR Public/Granted day:2016-06-23
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