Invention Grant
US09489974B2 Method of fabricating a BPM template using hierarchical BCP density patterns 有权
使用分层BCP密度模式制作BPM模板的方法

Method of fabricating a BPM template using hierarchical BCP density patterns
Abstract:
The embodiments disclose a method including patterning a template substrate to have different densities using hierarchical block copolymer density patterns in different zones including a first pattern and a second pattern, using a first directed self-assembly to pattern a first zone in the substrate using a first block copolymer material, and using a second directed self-assembly to pattern a second zone in the substrate using a second block copolymer material.
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