Invention Grant
US09489974B2 Method of fabricating a BPM template using hierarchical BCP density patterns
有权
使用分层BCP密度模式制作BPM模板的方法
- Patent Title: Method of fabricating a BPM template using hierarchical BCP density patterns
- Patent Title (中): 使用分层BCP密度模式制作BPM模板的方法
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Application No.: US14251303Application Date: 2014-04-11
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Publication No.: US09489974B2Publication Date: 2016-11-08
- Inventor: XiaoMin Yang , Shuaigang Xiao , Kim Y. Lee , Koichi Wago , Philip Steiner
- Applicant: SEAGATE TECHNOLOGY LLC
- Applicant Address: US CA Cupertino
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Cupertino
- Main IPC: G06F7/00
- IPC: G06F7/00 ; G11B5/855 ; G03F7/00

Abstract:
The embodiments disclose a method including patterning a template substrate to have different densities using hierarchical block copolymer density patterns in different zones including a first pattern and a second pattern, using a first directed self-assembly to pattern a first zone in the substrate using a first block copolymer material, and using a second directed self-assembly to pattern a second zone in the substrate using a second block copolymer material.
Public/Granted literature
- US20150294680A1 METHOD OF FABRICATING A BPM TEMPLATE USING HIERARCHICAL BCP DENSITY PATTERNS Public/Granted day:2015-10-15
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