Invention Grant
US09496394B2 Semiconductor structures with field effect transistor(s) having low-resistance source/drain contact(s)
有权
具有低电阻源极/漏极接触的场效应晶体管的半导体结构
- Patent Title: Semiconductor structures with field effect transistor(s) having low-resistance source/drain contact(s)
- Patent Title (中): 具有低电阻源极/漏极接触的场效应晶体管的半导体结构
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Application No.: US14523083Application Date: 2014-10-24
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Publication No.: US09496394B2Publication Date: 2016-11-15
- Inventor: Brent A. Anderson , Jeffrey B. Johnson , Edward J. Nowak
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Gibb & Riley, LLC
- Agent Michael J. LeStrange, Esq.
- Main IPC: H01L21/4763
- IPC: H01L21/4763 ; H01L29/78 ; H01L21/768 ; H01L21/3205 ; H01L21/336 ; H01L29/66

Abstract:
Disclosed are semiconductor structures comprising a field effect transistor (FET) having a low-resistance source/drain contact and, optionally, low gate-to-source/drain contact capacitance. The structures comprise a semiconductor body and, contained therein, first and second source/drain regions and a channel region. A first gate is adjacent to the semiconductor body at the channel region and a second, non-functioning, gate is adjacent to the semiconductor body such that the second source/drain region is between the first and second gates. First and second source/drain contacts are on the first and source/drain regions, respectively. The second source/drain contact is wider than the first and, thus, has a lower resistance. Additionally, spacing of the first and second source/drain contacts relative to the first gate can be such that the first gate-to-second source/drain contact capacitance is equal to or less than the first gate-to-first source/drain contact capacitance. Also disclosed are associated formation methods.
Public/Granted literature
- US20160118496A1 SEMICONDUCTOR STRUCTURES WITH FIELD EFFECT TRANSISTOR(S) HAVING LOW-RESISTANCE SOURCE/DRAIN CONTACT(S) Public/Granted day:2016-04-28
Information query
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