Invention Grant
- Patent Title: CMOS ultrasonic transducers and related apparatus and methods
- Patent Title (中): CMOS超声波换能器及相关设备及方法
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Application No.: US14172383Application Date: 2014-02-04
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Publication No.: US09499392B2Publication Date: 2016-11-22
- Inventor: Jonathan M. Rothberg , Keith G. Fife , Tyler S. Ralston , Gregory L. Charvat , Nevada J. Sanchez
- Applicant: Butterfly Network, Inc.
- Applicant Address: US CT Guilford
- Assignee: Butterfly Network, Inc.
- Current Assignee: Butterfly Network, Inc.
- Current Assignee Address: US CT Guilford
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00 ; B06B1/02 ; G10K11/18
Abstract:
CMOS Ultrasonic Transducers and processes for making such devices are described. The processes may include forming cavities on a first wafer and bonding the first wafer to a second wafer. The second wafer may be processed to form a membrane for the cavities. Electrical access to the cavities may be provided.
Public/Granted literature
- US20140217478A1 CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS Public/Granted day:2014-08-07
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