发明授权
US09502541B2 Forming fins on the sidewalls of a sacrificial fin to form a FinFET
有权
在牺牲翅片的侧壁上形成翅片以形成FinFET
- 专利标题: Forming fins on the sidewalls of a sacrificial fin to form a FinFET
- 专利标题(中): 在牺牲翅片的侧壁上形成翅片以形成FinFET
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申请号: US14604401申请日: 2015-01-23
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公开(公告)号: US09502541B2公开(公告)日: 2016-11-22
- 发明人: Georgios Vellianitis , Mark van Dal , Blandine Duriez , Richard Kenneth Oxland
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater Matsil, LLP
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L21/8238 ; H01L27/092 ; H01L29/78 ; H01L21/762 ; H01L27/088
摘要:
A fin structure for a fin field effect transistor (FinFET) device is provided. The device includes a substrate, a first semiconductor material disposed on the substrate, a shallow trench isolation (STI) region disposed over the substrate and formed on opposing sides of the first semiconductor material, and a second semiconductor material forming a first fin and a second fin disposed on the STI region, the first fin spaced apart from the second fin by a width of the first semiconductor material. The fin structure may be used to generate the FinFET device by forming a gate layer formed over the first fin, a top surface of the first semiconductor material disposed between the first and second fins, and the second fin.
公开/授权文献
- US20150132920A1 Fin Structure for a FinFET Device 公开/授权日:2015-05-14
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