发明授权
US09502541B2 Forming fins on the sidewalls of a sacrificial fin to form a FinFET 有权
在牺牲翅片的侧壁上形成翅片以形成FinFET

Forming fins on the sidewalls of a sacrificial fin to form a FinFET
摘要:
A fin structure for a fin field effect transistor (FinFET) device is provided. The device includes a substrate, a first semiconductor material disposed on the substrate, a shallow trench isolation (STI) region disposed over the substrate and formed on opposing sides of the first semiconductor material, and a second semiconductor material forming a first fin and a second fin disposed on the STI region, the first fin spaced apart from the second fin by a width of the first semiconductor material. The fin structure may be used to generate the FinFET device by forming a gate layer formed over the first fin, a top surface of the first semiconductor material disposed between the first and second fins, and the second fin.
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