Invention Grant
- Patent Title: Copper filling-up method
- Patent Title (中): 铜填充法
-
Application No.: US13974113Application Date: 2013-08-23
-
Publication No.: US09512534B2Publication Date: 2016-12-06
- Inventor: Kazuo Kondo , Takeyasu Saito , Naoki Okamoto , Masaru Bunya , Minoru Takeuchi
- Applicant: OSAKA PREFECTURE UNIVERSITY PUBLIC CORPORATION , NITTO BOSEKI CO., LTD.
- Applicant Address: JP Sakai JP Fukushima
- Assignee: OSAKA PREFECTURE UNIVERSITY PUBLIC CORPORATION,NITTO BOSEKI CO., LTD.
- Current Assignee: OSAKA PREFECTURE UNIVERSITY PUBLIC CORPORATION,NITTO BOSEKI CO., LTD.
- Current Assignee Address: JP Sakai JP Fukushima
- Agency: Nixon & Vanderhye P.C.
- Priority: JP2009-120133 20090518
- Main IPC: C25D5/18
- IPC: C25D5/18 ; H01L21/768 ; C25D3/38 ; H01L21/288

Abstract:
There is provided a method of well filling copper in a conductivity-rendered non-through hole having an aspect ratio (depth/hole diameter) of 5 or more on a substrate in a short period of time, and the method comprises using an acidic copper plating bath comprising a water-soluble copper salt, sulfuric acid, chlorine ion, a brightener and a copolymer of diallylamines and sulfur dioxide and filling copper in the non-through hole by periodic current reversal copper plating.
Public/Granted literature
- US20130334053A1 COPPER FILLING-UP METHOD Public/Granted day:2013-12-19
Information query