发明授权
- 专利标题: Plating cup with contoured cup bottom
- 专利标题(中): 电镀杯具有轮廓的杯底
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申请号: US13609037申请日: 2012-09-10
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公开(公告)号: US09512538B2公开(公告)日: 2016-12-06
- 发明人: Zhian He , Jingbin Feng , Shantinath Ghongadi , Frederick D. Wilmot
- 申请人: Zhian He , Jingbin Feng , Shantinath Ghongadi , Frederick D. Wilmot
- 申请人地址: US CA Fremont
- 专利权人: Novellus Systems, Inc.
- 当前专利权人: Novellus Systems, Inc.
- 当前专利权人地址: US CA Fremont
- 代理机构: Weaver Austin Villeneuve & Sampson LLP
- 主分类号: C25D17/00
- IPC分类号: C25D17/00 ; C25D17/06 ; C25D17/12 ; C25D7/12
摘要:
Disclosed herein are cups for engaging wafers during electroplating in clamshell assemblies and supplying electrical current to the wafers during electroplating. The cup can comprise an elastomeric seal disposed on the cup and configured to engage the wafer during electroplating, where upon engagement the elastomeric seal substantially excludes plating solution from a peripheral region of the wafer, and where the elastomeric seal and the cup are annular in shape, and comprise one or more contact elements for supplying electrical current to the wafer during electroplating, the one or more contact elements attached to and extending inwardly towards a center of the cup from a metal strip disposed over the elastomeric seal. A notch area of the cup can have a protrusion or an insulated portion on a portion of a bottom surface of the cup where the notch area is aligned with a notch in the wafer.
公开/授权文献
- US20150191843A9 PLATING CUP WITH CONTOURED CUP BOTTOM 公开/授权日:2015-07-09
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