Invention Grant
US09520204B2 Cold stripper for high energy ion implanter with tandem accelerator 有权
带有串联加速器的高能离子注入机的冷拔机

Cold stripper for high energy ion implanter with tandem accelerator
Abstract:
A cold stripper for a high-energy ion implanter system is provided. The cold stripper including a stripper tube having a hollow cavity, a first aperture in the stripper tube to admit an ion beam of positively charged ions into the hollow cavity and a second aperture in the stripper tube to discharge the ion beam from the hollow cavity, a gas pump coupled to the hollow cavity to introduce a gas into the hollow cavity, one or more cooling passages in the stripper tube, and a coolant pump coupled to the one or more cooling passages to circulate a coolant through the one or more cooling passages.
Information query
Patent Agency Ranking
0/0