Invention Grant
US09520204B2 Cold stripper for high energy ion implanter with tandem accelerator
有权
带有串联加速器的高能离子注入机的冷拔机
- Patent Title: Cold stripper for high energy ion implanter with tandem accelerator
- Patent Title (中): 带有串联加速器的高能离子注入机的冷拔机
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Application No.: US14140893Application Date: 2013-12-26
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Publication No.: US09520204B2Publication Date: 2016-12-13
- Inventor: Shengwu Chang
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J23/00
- IPC: H01J23/00 ; G21K1/14 ; H05H5/06 ; H01J37/317 ; H01L21/265 ; H05H7/08

Abstract:
A cold stripper for a high-energy ion implanter system is provided. The cold stripper including a stripper tube having a hollow cavity, a first aperture in the stripper tube to admit an ion beam of positively charged ions into the hollow cavity and a second aperture in the stripper tube to discharge the ion beam from the hollow cavity, a gas pump coupled to the hollow cavity to introduce a gas into the hollow cavity, one or more cooling passages in the stripper tube, and a coolant pump coupled to the one or more cooling passages to circulate a coolant through the one or more cooling passages.
Public/Granted literature
- US20150187450A1 COLD STRIPPER FOR HIGH ENERGY ION IMPLANTER WITH TANDEM ACCELERATOR Public/Granted day:2015-07-02
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