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    Cold stripper for high energy ion implanter with tandem accelerator
    5.
    发明授权
    Cold stripper for high energy ion implanter with tandem accelerator 有权
    带有串联加速器的高能离子注入机的冷拔机

    公开(公告)号：US09520204B2

    公开(公告)日：2016-12-13

    申请号：US14140893

    申请日：2013-12-26

    申请人： Varian Semiconductor Equipment Associates, Inc.

    发明人： Shengwu Chang

    IPC分类号： H01J23/00 ,  G21K1/14 ,  H05H5/06 ,  H01J37/317 ,  H01L21/265 ,  H05H7/08

    CPC分类号： G21K1/14 ,  H01J37/3171 ,  H01J2237/002 ,  H01J2237/0048 ,  H01J2237/047 ,  H01J2237/061 ,  H01J2237/082 ,  H01L21/265 ,  H05H5/063 ,  H05H2007/088

    摘要： A cold stripper for a high-energy ion implanter system is provided. The cold stripper including a stripper tube having a hollow cavity, a first aperture in the stripper tube to admit an ion beam of positively charged ions into the hollow cavity and a second aperture in the stripper tube to discharge the ion beam from the hollow cavity, a gas pump coupled to the hollow cavity to introduce a gas into the hollow cavity, one or more cooling passages in the stripper tube, and a coolant pump coupled to the one or more cooling passages to circulate a coolant through the one or more cooling passages.

    摘要翻译： 提供了一种用于高能离子注入机系统的冷汽提器。 所述冷汽提器包括具有中空腔的汽提管，所述汽提管中的第一孔，用于允许带正电荷的离子的离子束进入所述中空腔，并且所述汽提管中的第二孔用于从所述中空腔排出离子束， 耦合到所述中空腔的气泵以将气体引入所述中空腔，所述汽提管中的一个或多个冷却通道和联接到所述一个或多个冷却通道的冷却剂泵，以使冷却剂循环通过所述一个或多个冷却通道 。

    Accelerator for Two Particle Beams for Producing a Collision
    6.
    发明申请
    Accelerator for Two Particle Beams for Producing a Collision 有权
    用于产生碰撞的两颗粒子的加速器

    公开(公告)号：US20130127376A1

    公开(公告)日：2013-05-23

    申请号：US13703065

    申请日：2011-04-05

    申请人： Oliver Heid

    发明人： Oliver Heid

    IPC分类号： H05H5/06

    CPC分类号： H05H5/06 ,  G21B3/00 ,  Y02E30/18

    摘要： An accelerator for accelerating two beams of charged particles and for producing a collision of the beams includes: an apparatus for producing an electrostatic potential field such that the two beams are acceleratable or deceleratable by the electrostatic field, a reaction zone for collision of the charged particles; first and second acceleration distances for the first and second beams, each acceleration distance directed towards the reaction zone, wherein the reaction zone is arranged geometrically with respect to the potential field and to the acceleration distances such that the particles of the beams are acceleratable towards the reaction zone along the first and second acceleration distances and, after interaction in the reaction zone and passage through the reaction zone, are deceleratable in the potential field, such that energy used by the potential field apparatus for accelerating the beams towards the reaction zone can be at least partially recovered by the deceleration.

    摘要翻译： 用于加速两束带电粒子并产生光束碰撞的加速器包括：用于产生静电势场的装置，使得两束可通过静电场加速或减速;用于碰撞的带电粒子的反应区 ; 第一和第二光束的第一和第二加速距离，每个加速距离指向反应区域，其中反应区域相对于电场几何地布置，并且加速距离使得该光束的粒子朝向 反应区沿着第一加速距离和第二加速距离，并且在反应区域中相互作用并通过反应区域之后，在势场中可减速，使得用于将梁加速到反应区域的势场装置所使用的能量可以是 至少部分通过减速来恢复。

    ACCELERATOR FOR CHARGED PARTICLES
    7.
    发明申请
    ACCELERATOR FOR CHARGED PARTICLES 有权
    加速器填充颗粒

    公开(公告)号：US20120313554A1

    公开(公告)日：2012-12-13

    申请号：US13581263

    申请日：2011-02-02

    申请人： Oliver Heid

    发明人： Oliver Heid

    IPC分类号： H05H13/04 ,  H05H5/06

    CPC分类号： H05H5/04 ,  H05H5/02 ,  H05H5/06

    摘要： An accelerator for charged particle may include: a capacitor stack which includes a first electrode that can be brought to a first potential, a second electrode that is concentric to the first electrode and can be brought to a second potential differing from the first potential, and at least one intermediate electrode that is concentrically arranged between the first electrode and the second electrode and can be brought to an intermediate potential lying between the first potential and the second potential; a switching device to which the electrodes of the capacitor stack are connected and which is designed such that the concentric electrodes of the capacitor stack can be brought to increasing potential stages during operation of the switching device; a first and a second acceleration channel formed by first and second openings in the electrodes of the capacitor stack such that charged particles can be accelerated along the first and second acceleration channel by means of the electrodes; and a device which can influence the accelerated particle beam within the capacitor stack such that photons emitted by the particle beam are produced.

    摘要翻译： 用于带电粒子的加速器可以包括：电容器堆叠，其包括可以被带到第一电位的第一电极，与第一电极同心并且可以被带到与第一电位不同的第二电位的第二电极，以及 至少一个中间电极，其同心地布置在所述第一电极和所述第二电极之间，并且可以处于位于所述第一电位和所述第二电位之间的中间电位; 连接电容器堆叠的电极的开关装置，其被设计成使得电容器堆叠的同心电极在开关装置的操作期间可以增加电位级; 第一加速通道和第二加速通道，由电容器叠层的电极中的第一和第二开口形成，使得带电粒子可以通过电极沿第一和第二加速通道加速; 以及可以影响电容器堆叠内的加速粒子束的装置，从而产生由粒子束发射的光子。

    Production of high beam currents at low energies for use in ion implantation systems
    8.
    发明授权
    Production of high beam currents at low energies for use in ion implantation systems 失效
    在低能量下生产用于离子注入系统的远光电流

    公开(公告)号：US5306922A

    公开(公告)日：1994-04-26

    申请号：US33286

    申请日：1993-03-16

    申请人： John P. O'Connor

    发明人： John P. O'Connor

    IPC分类号： C23C14/48 ,  H01J37/317 ,  H01L21/265 ,  H05H5/06

    CPC分类号： H01L21/2658 ,  H01J37/3171 ,  H05H5/06 ,  H01J2237/0473

    摘要： As geometries of semiconductor devices shrink in size and the number of circuits per unit area increase, a number of the ion implants required to fabricate these devices will use very low energies (as low as 2 keV). In the present invention, a technique is utilized that generates substantial beam currents at low energies utilizing ion sources that are standard in the industry. Molecular ions are extracted from the plasma of the ion source at voltages numerically higher than the desired electron voltage at which the desired atomic ions are to strike the target, and are then dissociated into components which include the desired atomic ions moving with an energy which is a fraction of that at which the molecular ions were extracted.

    摘要翻译： 由于半导体器件的尺寸缩小，并且每单位面积的电路数量增加，制造这些器件所需的许多离子注入将使用非常低的能量（低至2keV）。 在本发明中，利用利用工业中标准的离子源在低能量下产生大量束电流的技术。 分子离子从离子源的等离子体中提取，数值高于期望的电子电压，在期望的电子电压下，期望的原子离子将撞击靶，然后解离成包含所需原子离子的成分，该能量以 分子离子被萃取的一部分。

    Tandem betatron
    9.
    发明授权
    Tandem betatron 失效
    串联betatron

    公开(公告)号：US5103186A

    公开(公告)日：1992-04-07

    申请号：US643315

    申请日：1991-01-22

    申请人： Rhonald K. Keinigs

    发明人： Rhonald K. Keinigs

    IPC分类号： H05H5/06 ,  H05H11/04

    CPC分类号： H05H11/04 ,  H05H5/06

    摘要： Two betatrons are provided in tandem for alternately accelerating an electron beam to avoid the single flux swing limitation of conventional betatrons and to accelerate the electron beam to high energies. The electron beam is accelerated in a first betatron during a period of increasing magnetic flux. The eletron beam is extracted from the first betatron as a peak magnetic flux is reached and then injected into a second betatron at a time of minimum magnetic flux in the second betatron. The cycle may be repeated until the desired electron beam energy is obtained. In one embodiment, the second betatron is axially offset from the first betatron to provide for electron beam injection directly at the axial location of the beam orbit in the second betatron.

    摘要翻译： 串联提供两个反相器以交替加速电子束，以避免常规反应器的单通量摆动限制并将电子束加速至高能量。 在增加磁通量的时段期间，电子束在第一贝塔管中被加速。 当达到峰值磁通量时，电子束从第一个白炽灯提取，然后在第二个白炽灯中以最小磁通量的时间注入第二个白炽灯。 可以重复循环，直到获得所需的电子束能量。 在一个实施例中，第二反应器从第一反应器轴向偏移，直接在第二反应堆中的光束轨道的轴向位置提供电子束注入。