Invention Grant
- Patent Title: Holder assembly for cooperating with an environmental cell and an electron microscope
- Patent Title (中): 用于与环境细胞和电子显微镜配合的支架组件
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Application No.: US13769040Application Date: 2013-02-15
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Publication No.: US09524850B2Publication Date: 2016-12-20
- Inventor: Hendrik Willem Zandbergen , Pleun Dona , Gerardus Nicolaas Anne van Veen
- Applicant: FEI Company , Delft University of Technology
- Applicant Address: US OR Hillsboro
- Assignee: FEI COMPANY
- Current Assignee: FEI COMPANY
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, P.C.
- Agent Michael O. Scheinberg
- Priority: EP12157055 20120227
- Main IPC: H01J37/20
- IPC: H01J37/20

Abstract:
A holder assembly comprises a first and a separable second part, the first part detachable from the second part, the first part comprising a tube and an environmental cell interface and the second part comprising an electron microscope interface, as a result of which the first part can be cleaned at high temperatures without exposing the second part to said high temperature.By forming the holder assembly from detachable parts, one part can be cleaned by heating it to a high temperature of, for example, 1000° C., clogging in the tubes can be removed by reduction of carbon, while keeping the other part (often comprising mechanical fittings, ball bearing, sliders, or such like) cool. The cleaning can be enhanced by blowing, for example, oxygen or hydrogen through the tubes.
Public/Granted literature
- US20130213439A1 Holder Assembly for Cooperating with an Environmental Cell and an Electron Microscope Public/Granted day:2013-08-22
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