发明授权
US09525119B2 Flexible micromachined transducer device and method for fabricating same 有权
柔性微机械传感器装置及其制造方法

Flexible micromachined transducer device and method for fabricating same
摘要:
Techniques and structures for providing flexibility of a micromachined transducer array. In an embodiment, a transducer array includes a plurality of transducer elements each comprising a piezoelectric element and one or more electrodes disposed in or on a support layer. The support layer is bonded to a flexible layer including a polymer material, wherein flexibility of the transducer array results in part from a total thickness of a flexible layer. In another embodiment, flexibility of the transducer array results in part from one or more flexural structures formed therein.
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