发明授权
- 专利标题: Flexible micromachined transducer device and method for fabricating same
- 专利标题(中): 柔性微机械传感器装置及其制造方法
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申请号: US14103672申请日: 2013-12-11
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公开(公告)号: US09525119B2公开(公告)日: 2016-12-20
- 发明人: Dimitre Latev , Arman Hajati , Darren Todd Imai , Ut Tran
- 申请人: Dimitre Latev , Arman Hajati , Darren Todd Imai , Ut Tran
- 申请人地址: US NH Lebanon
- 专利权人: FUJIFILM DIMATIX, INC.
- 当前专利权人: FUJIFILM DIMATIX, INC.
- 当前专利权人地址: US NH Lebanon
- 代理机构: Blakely, Sokoloff, Taylor & Zafman LLP
- 主分类号: B06B1/02
- IPC分类号: B06B1/02 ; H01L41/04 ; B06B1/06 ; H01L41/047 ; H01L41/09 ; H01L41/29 ; B32B37/18
摘要:
Techniques and structures for providing flexibility of a micromachined transducer array. In an embodiment, a transducer array includes a plurality of transducer elements each comprising a piezoelectric element and one or more electrodes disposed in or on a support layer. The support layer is bonded to a flexible layer including a polymer material, wherein flexibility of the transducer array results in part from a total thickness of a flexible layer. In another embodiment, flexibility of the transducer array results in part from one or more flexural structures formed therein.
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