Fin height control techniques for FINFET fabrication are disclosed. The technique includes a method for controlling the height of plurality of fin structures to achieve uniform height thereof relative to a top surface of isolation material located between fin structures on a semiconductor substrate. The isolation material located between fin structures may be selectively removed after treatment to increase its mechanical strength such as by, for example, annealing and curing. A sacrificial material may be deposited over the isolation material between the fin structures in a substantially uniform thickness. The top portion of the fin structures may be selectively removed to achieve a uniform planar surface over the fin structures and sacrificial material. The sacrificial material may then be selectively removed to achieve a uniform fin height relative to the isolation material.