Abstract:
A semiconductor device with overlapping contacts is provided. In one aspect, the semiconductor device includes a dielectric layer; a first contact located in the dielectric layer; and a second contact located in the dielectric layer adjacent to the first contact, wherein a portion of the second contact overlaps a top surface of the first contact.
Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to graphene detectors integrated with optical waveguide structures and methods of manufacture. The structure includes a plurality of non-planar fin structures composed of substrate material, and a non-planar sheet of graphene material extending entirely over each of the plurality of non-planar fin structures.
Abstract:
A method of fabricating a FinFET device includes forming contact openings for source/drain contacts prior to performing a replacement metal gate (RMG) module. Etch selective metals are used to form source/drain contacts and gate contacts optionally within active device regions using a block and recess technique.
Abstract:
Integrated circuits including memory cells and methods for operating memory cells are provided. In an embodiment, a method is provided for operating a memory including a plurality of operational memory cells. The method includes providing a word line voltage on a selected word line corresponding to a selected operational memory cell of the plurality of operational memory cells and to a corresponding reference memory cell. The method includes applying an operational bias current on an operational bit line to the selected operational memory cell. Also, the method includes scanning a reference bias current from a first value to a second value on a reference bit line to the reference memory cell. Further, the method includes comparing reference cell currents on the reference bit line with an operational cell current on the operational bit line to determine a logic state of the selected operational memory cell.
Abstract:
Disclosed is a calibration circuit and method. The circuit includes: a DAC that outputs an analog parameter and includes output parameter adjustment circuitry; a comparator that receives a reference parameter and the analog parameter; and a control circuit (with select logic) connected to the comparator and DAC in a feedback loop. During a calibration mode, the magnitude of the analog parameter is adjusted by ½ DAC step in one direction and the feedback loop is used to perform a binary search calibration process. During an operation mode, the magnitude of the analog parameter is adjusted by ½ DAC step in the opposite direction. The select logic selects the DAC step identified by the calibration process or the next higher DAC step as a final DAC step. The control circuit outputs a final DAC code corresponding to the final DAC step and the DAC generates a calibrated parameter based thereon.
Abstract:
Fin height control techniques for FINFET fabrication are disclosed. The technique includes a method for controlling the height of plurality of fin structures to achieve uniform height thereof relative to a top surface of isolation material located between fin structures on a semiconductor substrate. The isolation material located between fin structures may be selectively removed after treatment to increase its mechanical strength such as by, for example, annealing and curing. A sacrificial material may be deposited over the isolation material between the fin structures in a substantially uniform thickness. The top portion of the fin structures may be selectively removed to achieve a uniform planar surface over the fin structures and sacrificial material. The sacrificial material may then be selectively removed to achieve a uniform fin height relative to the isolation material.
Abstract:
A body tie test structure and methods for its manufacture are provided. The transistor comprises a body-tied semiconductor on insulator (SOI) transistor formed in a layer of semiconductor material, the transistor comprising a cross-shaped gate structure with a substantially constant gate length L. An insulating blocking layer enables formation of a spacer region in the layer of semiconductor material separating the source and drain regions from the body tie region. A conductive channel with substantially the same inversion characteristics as the intrinsic transistor body connects the body tie to the intrinsic transistor body through the spacer region.
Abstract:
One illustrative IC product disclosed herein includes a first merged doped source/drain region that includes first and second doped regions and an isolation structure positioned adjacent the first doped region. In this example, the product also includes a contact structure positioned adjacent the isolation structure, wherein the contact structure includes a first portion positioned below an upper surface of the first merged doped source/drain region and a second portion positioned above the upper surface, wherein the first portion physically contacts both the first and second doped regions. The product also includes a layer of insulating material positioned on and in physical contact with a portion of an upper surface of the first portion of the contact structure.
Abstract:
Various embodiments relate to gate-all-around (GAA) transistors and methods of forming such transistors. In some embodiments, a method performed on a precursor structure includes selectively removing a sacrificial nanosheet to open a vertical gap between a pair of semiconductor nanosheets; forming a first work function metal to surround the precursor nanosheet stack and fin, the first work function metal filling the vertical gap between the pair of semiconductor nano sheets; selectively removing first work function metal surrounding the fin while preserving an entirety of first work function metal surrounding the nanosheet stack; and forming a second work function metal: over a remaining portion of the first work function metal on nanosheet stack, and surrounding the fin, where first work function metal includes a different material than second work function metal.
Abstract:
The present disclosure relates to a structure which includes a diode-based Dickson charge pump which is configured to use an independent multi-gate device to reduce a threshold voltage of a plurality of transistor diodes during a charging and pumping phase.