Invention Grant
US09530961B2 Mask assembly for deposition, deposition apparatus, and method employing the same
有权
用于沉积的掩模组件，沉积装置和使用其的方法
- Patent Title: Mask assembly for deposition, deposition apparatus, and method employing the same
- Patent Title (中): 用于沉积的掩模组件，沉积装置和使用其的方法
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Application No.: US14697925Application Date: 2015-04-28
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Publication No.: US09530961B2Publication Date: 2016-12-27
- Inventor: Sangmin Yi , Mingoo Kang , Minchul Song , Sangshin Lee , Sangyun Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2014-0123709 20140917
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L51/56
Abstract:
Disclosed is a mask assembly for deposition including: a frame having an opening; a mask having at least one pattern part formed in a second direction that is different from a first direction, wherein at least a portion of the mask is supported by the frame and the at least one pattern part has one or more slits continuously formed in the first direction; and at least one support stick extending in the second direction across the opening so as to support at least a portion of the mask.
Public/Granted literature
- US20160079532A1 MASK ASSEMBLY FOR DEPOSITION, DEPOSITION APPARATUS, AND METHOD EMPLOYING THE SAME Public/Granted day:2016-03-17
Information query
IPC分类:
