Invention Grant
US09535086B2 Interface of a microfabricated scanning force sensor for combined force and position sensing
有权
用于组合力和位置感测的微加工扫描力传感器的接口
- Patent Title: Interface of a microfabricated scanning force sensor for combined force and position sensing
- Patent Title (中): 用于组合力和位置感测的微加工扫描力传感器的接口
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Application No.: US14742105Application Date: 2015-06-17
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Publication No.: US09535086B2Publication Date: 2017-01-03
- Inventor: Felix Beyeler , Simon Muntwyler
- Applicant: FEMTOTOOLS AG
- Applicant Address: CH Buchs
- Assignee: FemtoTools AG
- Current Assignee: FemtoTools AG
- Current Assignee Address: CH Buchs
- Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
- Priority: EP14173713 20140624
- Main IPC: G01Q20/00
- IPC: G01Q20/00 ; B81C99/00 ; G01Q20/04 ; G01Q60/36 ; G01N3/42 ; G01L1/14 ; G01L5/00 ; G01Q10/04
Abstract:
A micro fabricated sensor for micro-mechanical and nano-mechanical testing and nano-indentation. The sensor includes a force sensing capacitive comb drive for the sensing of a force applied to a sample, a position sensing capacitive comb drive for the sensing of the position of a sample and a micro fabricated actuator to apply a load to the sample. All the sensor components mentioned above are monolithically integrated on the same silicon MEMS chip.
Public/Granted literature
- US20150369839A1 DESIGN AND INTERFACE OF A MICROFABRICATED SCANNING FORCE SENSOR FOR COMBINED FORCE AND POSITION SENSING Public/Granted day:2015-12-24
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