发明授权
- 专利标题: Imprint method and imprint system
- 专利标题(中): 印记法和印记制度
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申请号: US13529617申请日: 2012-06-21
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公开(公告)号: US09541847B2公开(公告)日: 2017-01-10
- 发明人: Masato Suzuki , Takuya Kono , Manabu Takakuwa , Kazuya Fukuhara
- 申请人: Masato Suzuki , Takuya Kono , Manabu Takakuwa , Kazuya Fukuhara
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Finnegan, Henderson, Farabrow, Garrett & Dunner LLP
- 优先权: JP2011-159746 20110721
- 主分类号: B29C59/16
- IPC分类号: B29C59/16 ; G03F9/00 ; G03F7/00 ; B82Y10/00 ; B82Y40/00 ; B29C43/02
摘要:
According to one embodiment, an imprint method comprises coating a photo-curable organic material on a film to be processed, bringing a concave-convex pattern of a template into contact with the photo-curable organic material, applying a force to the template in such a state that the template is brought into contact with the photo-curable organic material, curing the photo-curable organic material by irradiating light onto the photo-curable organic material, in such a state that the template is brought into contact with the photo-curable organic material, and releasing the template from the photo-curable organic material after the light irradiation. The force applied to the template corresponds to a gap between a surface of the film to be processed and the template.
公开/授权文献
- US20130020741A1 IMPRINT METHOD AND IMPRINT SYSTEM 公开/授权日:2013-01-24
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